Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R R H F F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) Q: 6 Q: 8 A B C D E F H I J Y

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Vacuum Pad: Ball Joint Type

Dimensions H B Ball joint type: 10 to 32 (mm) D Model B d H Y ZPNA-M10 M10 x 1 3 14 E ZPNA-M14 M14 x 1 5 19 ZPNA-M8 M8 x 1 3 12 C A B Ball joint type: 40, 50 ZP3 D ZP3E ZP2 E Y ZP2V C A ZP B ZPT ZPR ZPT ZPR (mm) Model B A C D E Y XT661 ZP10F 10 12 6.5 1.5 ZP13F 13 15 3 8.2 7 2 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 25 28 4 10.2 3 ZP32F 32 35 9 ZP40F 40 43 10 13 5 26 ZP50F 50 53 8 14 6 725 ZPT/

MXW

Body tapped H l Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Model Bolt D 5H9 + 0.030 depth 4.5 2.1 6 MXW8 M4 x 0.7 0 5H9 + 0.030 depth 4.5 6 2.1 MXW12 M4 x 0.7 0 Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Bolt Model 6H9 + 0.030 depth 5.5 9 4.4 MXW16 M5 x 0.8 0 6H9 + 0.030 depth 5.5 5H9 + 0.030 depth 4.5 13 4.4

Series KP/KPQ/KPG

P D M 8 A L 4.2 D H Connection threads Straight Union: KPQH, KPGH Effective area mm D Model L Applicable tubing O.D. mm Note 1) 2-Applicable tubing Weight g M TPH TPS 4 KPQH04-00 KPGH04-00 10.4 37.4 18 4 4 4 D D 6 KPQH06-00 KPGH06-00 12.8 39.6 19.5 10 10 6 M M L 8 KPQH08-00 KPGH08-00 15.2 44.4 21.5 26 18 10 10 KPQH10-00 KPGH10-00 18.5 48.6 24 41 29 15 12 KPQH12-00 KPGH12-00 20.9 50.6 25 58

Series KP/KPQ/KPG

P D M 8 A L 4.2 D H Connection threads Straight Union: KPQH, KPGH Effective area mm D Model L Applicable tubing O.D. mm Note 1) 2-Applicable tubing Weight g M TPH TPS 4 KPQH04-00 KPGH04-00 10.4 37.4 18 4 4 4 D D 6 KPQH06-00 KPGH06-00 12.8 39.6 19.5 10 10 6 M M L 8 KPQH08-00 KPGH08-00 15.2 44.4 21.5 26 18 10 10 KPQH10-00 KPGH10-00 18.5 48.6 24 41 29 15 12 KPQH12-00 KPGH12-00 20.9 50.6 25 58

5 Port Solenoid Valve SY Series

) MN: Without lead wire D: With connector + + + + LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H:Lead wire length 600 mm Light/surge voltage suppressor Electrical entry for G, H, L, M, W Electrical entry for D + + Nil Without light/surge voltage suppressor S Z With surge voltage suppressor With light/surge voltage suppressor R With surge voltage

KP/KPQ/KPG

P D M A L 8 4.2 D H Connection threads Straight Union: KPQH, KPGH Effective area mm D Model L Applicable tubing O.D. mm Note 1) 2-Applicable tubing Weight g M TPH TPS 4 KPQH04-00 KPGH04-00 10.4 4 4 37.4 18 4 D D 6 KPQH06-00 KPGH06-00 12.8 39.6 19.5 10 10 6 M M L 8 KPQH08-00 KPGH08-00 15.2 26 18 10 44.4 21.5 10 KPGH10-00 KPQH10-00 18.5 15 24 41 29 48.6 12 KPQH12-00 KPGH12-00 20.9 46 18 50.6

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

P D M 8 A L 4.2 D H Connection threads Straight Union: KPQH, KPGH Effective area mm D Model L Applicable tubing O.D. mm Note 1) 2-Applicable tubing Weight g M TPH TPS 4 KPQH04-00 KPGH04-00 10.4 4 4 37.4 18 4 D D 6 KPQH06-00 KPGH06-00 12.8 39.6 19.5 10 10 6 M M L 8 KPQH08-00 KPGH08-00 15.2 26 18 10 44.4 21.5 10 KPGH10-00 KPQH10-00 18.5 15 24 41 29 48.6 12 KPQH12-00 KPGH12-00 20.9 46 18 50.6

Shock Absorbers and Rate Controls

(Irtodel) Al d mensiDns in millimeters. (lhlog No. (I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ?

New

z300 Q F D z 300 Q F C R E C R E A B1 B1 A B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke(mm) (mm) I H J Q: 6 Q: 8 Stroke A B C D E F H I J Y Model R S R S 20 +10 3 0 ZPR40F10-0-A14 ZPR50F10-0-A14 30 40 43 12.5 18.5 32.3 49.5 61.5 129.5 5 +20 +7 50 12.8 24.3 15.2 26.2 50 50 53 13.5 19.5 33.3 50.5 62.5 130.5 6 +25 +40 +52 15

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

Stopper Cylinder

D-M9A Auto switch Auto switch B A (22) 22 B A Hs Hs 24.5 ( ): For D-A96 type 16 16 A B A B Hs Hs D-C7 D-C8 D-C73C D-C80C D-H7 D-H7W D-H7NF D-H7BA D-H7C B A Hs B Hs A Auto Switch Proper Mounting Position Auto Switch Mounting Height Auto switch model (mm) (mm) RSQ D-H7BA D-H7W D-H7 D-H7C D-H7NF D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-C7 D-C80 D-C73C D-C80C D-M9V D-M9WV D-M9AV

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Y300-D Y300T-D Y400-D Y400T-D Seal HNBR Y220P-050S Y320P-050S Y420P-050S Dimensions Spacer Spacer with bracket A (Spacer width) A (Spacer width) K D F H J G E E E D C Center of F.R.L. body Center of F.R.L. body B C B EE (Except Y300T-D) Part no.

MQQ

NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.