IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point Set point Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000 3500

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

VS 8-2/VS 8-4

9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm

S Couplers

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

4-channel Flow Monitor ( compatible)

[F90] Setting of all functions is completed : Setting of each function Every time the SET button is pressed, the display moves to the next function in order of "Setting of each function" on page 55. Set by using the UP and DOWN buttons.

HRX-OM-Q026

When the ambient Continuous monitoring temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Compact Electric Actuator Series LG1

How to Order B LG1 02 1 Cable length 02 03 04 05 2m 3m 4m 5m Nonstandard Motor Cables Cables for connecting nonstandard motors and drivers. Cable lengths other than those shown below should be arranged by the customer.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

20 15 B B 5 1 Type S32 / Side Ported (Single solenoid coil is located on same side as the A , Bport.) 2n-M5 0.8 (A, B port) (Pitch) P=10.5 14.5 SS5YJ3-S32Station -M5T, N3T [ ] for AC L type plug connector (L) M type plug connector (M) 91.7(GZ:93.1) [95.1] 78.8(GZ:80.2) [82.2] 1 15.5 1.5 36.5 13.5 79.4 [82] 1 R 57.4(GZ:58.1) [59.1] 56.4(GZ:57.1)[58.1] A A A A A R 35.5 B B B B B P P 53.7 [55

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQD 24V 12V 100V 200V 110V 220V 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 To remove manifold from DIN rail: 1) Loosen the clamp screw on the A side of both ends of the manifold. 2) Lift the A side of the manifold off the DIN rail and slide it in the direction of the B side.

VQ5000

Hirose Electric Co., Ltd. 2-M2.6 x 0.45 55 Socket side 1425 113 Terminal no. 47.04 How to Order Manifold F 03 U VV5Q 5 1 1 Option 08 Symbol Series Option Nil CD1 CD2 CU1 CU2 K (3) SB SD SU None Cable (Length) 5 VQ5000 Exhaust cleaner for Rc 1: D side exhaust 0 1 2 3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Exhaust cleaner for Rc 1 1/2: D side exhaust Manifold Exhaust

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

E-P HYREG ® Series VY1 1

2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12