Electric Actuator/Slider Type

Vertical Mounting, Ball Bushing Bearing r Over 40 stroke e 35 stroke or less 100 100 LEYG32L LEYG32L Load mass m [kg] Load mass m [kg] 10 10 LEYG25L LEYG25L 1 1 0.1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

5

-6A 80 100 20 0.065 0.117 83 73 5 4 4 x 30 l Polished round 20 CDP-7A 100 25 0.065 0.117 88 78 5 4 4 x 36 l Polished round 24 Split pins and flat washers are included.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

20 161 + l 182 + l 141 169 25 170 + l 191 + l 148 175 32 173 + l 197 + l 151 201 40 193 + l 221 + l 173 234 50 222 + l 254 + l 202 244 63 227 + l 264 + l 207 310.5 80 261 + l 319.5 + l 252 336.5 100 269 + l 345.5 + l 260 ( ): Denotes the dimensions for long stroke.

Hydraulic

C X L + Stroke 47 32 to 100 2-P (port size) Approx.

Air Cylinder

+ l 100 244 253 + l 266 275 + l 238 (252) 247 (261) + l 260 (274) 269 (283) + l Bore size (mm) Double end lock: -Wl Z ZZ Without rod boot With rod boot Without rod boot With rod boot 20 141 161 + l 152 172 + l 25 148 170 + l 161 183 + l 32 151 173 + l 166 188 + l 40 173 193 + l 191 211 + l 50 202 222 + l 222 242 + l 63 207 227 + l 229 249 + l 80 252 261 + l 270 279 + l 100 260 269 + l 282

Table of Contents

5 to 50 Inlet air temperature (C) (1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320 400 Outlet air flowrate (l/min(ANR)) Purge air flowrate (l/min(ANR))(3) 75 110 170 240 300 25 40 57 80 100 Inlet air pressure (MPa) 0.7 Inlet air temperature (C) 25 25 25 1 l/min (ANR

CA2

Series CA2 40, 50, 63, 80, 100 How to Order Without auto switch L 50 100 JN CA2 Number of auto switches Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

CV/MVGQ

L 50 100 J 1 CV3 Without auto switch 100 L 50 Y7BW J 1 CDV3 With auto switch Bore size 40 50 63 80 100 Number of auto switches 40 mm 50 mm 63 mm 80 mm 100 mm Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

CV/MVGQ

32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

1

584 C85 CXWM20-275 119.5 289 20 90 620 277 329 606 634 CXWM20-300 132 314 20 90 670 302 354 656 684 C95 CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L Model Stroke SS ZZ Z Model F L K P Q S SS Z ZZ CP95 175 257 287 200 282 312 125 207 237 150 232 262 110 192 222 120 202 232 80 135 152 50 150 210 229 75 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 125

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm

Table of Contents

VAC, 100 VDC or less.

MGP

(kg) 25 25 20 20 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 1 2 25mm stroke V = 400mm/s 1 3 Over 25mm stroke V = 400mm/s 50 50 63 63 50 50 Load weight m (kg) Load weight m (kg) 10 10 40 40 5 5 32 32 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL80, 100 1 4 V = 400mm/s Note: 1kg = 2.2046 lb

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Table of Contents

VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs. Tube length L (mm) How to read the graph The start-up speed stands for the degree of the nozzle inside pressure rise per the unit of time. The greater it is, the stronger the shock wave from the nozzle becomes.

Table of Contents

min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Max. vacuum pressure: 84 kPa Y3 X3 ZY -10L Max. vacuum pressure: 53 kPa Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 100 100 100 100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR