Compact

. 600 0.51000(0.4 + 0.4) 1000 LEC = T1: Acceleration time [s] Time until reaching the set speed LEC S = 0.2 [s] T1 = V/a1 [s] T3 = V/a2 [s] T4 = 0.3 [s] T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed LEC

Vacuum Pad: Ball Joint Type

13 40 2 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 32 35 13 16 29.8 47 ZPR32F-0-B8 M8 x 1.25 Q: 4 Q: 6 Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 10.4 21.6 (mm) Q: 6 Q: 8 Pad diameter (mm) ZPR F-0-B8 (Without buffer/Female thread) 40 50 R 24.3 R S 15.2 S 20 to 32 12.8 26.2 S Hexagon

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) Brake Without brake With brake Nil B Home position switch None Yes (cable length 0.3m) Nil S Specifications 2 phase stepper motor (with/without brake) 5 phase stepper motor (with/without brake) Motor Lead screw Positioning repeatability Lead Speed Note1) Slide screw 8mm 0.05mm 6mm 3 to 100mm/s 9 (4)kg 4 (4)kg 12mm 6 to 200mm/s 4.5 (4)kg 2 (2)kg 12mm 6 to 200mm/s 3 (3)kg 1 (1)kg

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

46.5 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by tube diameter (mm) ZPR32F-0-B5 M5 x 0.8 Q: 4 Q: 6 13 16 29.8 47 32 35 Pad diameter (mm) ZPR32F-0-B8 M8 x 1.25 R 20.6 R S 12.8 S Dimensions by tube diameter 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S 20 to 32 12.8 26.2 ZPR 40/50 F-0-B8 (Without Buffer/Female Thread) S Width across

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

CJ2X/CUX/CQSX/CQ2X/CM2X

x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure M5 x 0.8 Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. 0.03 MPa 0.025 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature 1 to 200 mm/s 0.5 to 200 mm/s Piston speed

CJ2X/CUX/CQSX/CQ2X/CM2X

x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure M5 x 0.8 Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. 0.03 MPa 0.025 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature 1 to 200 mm/s 0.5 to 200 mm/s Piston speed

Modular Design with Uniform Body Style

N F A A J M N F S 2 x P1 (Port size) 2 x P1 (Port size) J M R R V2 V1 Q1 Q1 B C C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size) U P2 E G Clearance for maintenance (Pressure gauge port size)

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Dimensions MSUA20 Scale: 50% MSUA20-S/SE 8-M5 x 0.8 depth 10 C Top ported: MSUA20-SE 78 A port B port 14 2 M5 x 0.8 48 59 B 38 15.5 42 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (Positioning pin hole) A

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5.5 38 23 15.5 10.5 40 4.5 33h9 34 h9 17H9 5 6 H9 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 5.5 45 30 18.4 12.2 50 5 39h9 40 h9 20H9 6 7 H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3

7.4

Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

MXS Series Air Slide Table

Buffer Specifications Model MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 6 8 12 16 20 25 Bore size (mm) Horizontal mounting 2-20 in/s (50~500 mm/s) 2-12 in/s (50~300 mm/s) Piston speed Buffer stroke (mm) 5 10 At 0mm stroke At max. stroke 0.67 1.12 2.25 2.92 3.82 4.72 Buffer stroke load (lbf) 1.35 1.80 2.92 3.82 5.62 6.52 Note) Refer to P. 14 for cautions on buffer.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

ZR

With surge voltage suppressor S S and Z are not available for grommet style (DC). S is not available for AC. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged.

Microspeed Cylinder

(0.04 to 7.9in/s) Ambient and fluid temperature Ambient and fluid temperature Piston speed Piston rod diameter Piston speed Piston rod diameter 1 to 200mm/s (0.04 to 7.9in/s) 0.5 to 200mm/s (0.02 to 7.9in/s) 16 M8 x 1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 (10-32 nominal), Rc 1/8 M5 x 0.8 (10-32 nominal) 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x

Rotary Table/

34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 34h9 6H9 5.5 38 23 15.5 10.5 40 4.5 33h9 17H9 5 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 40h9 7H9 5.5 45 30 18.4 12.2 50 5 39h9 20H9 6 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3 x 0.5

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM