SMC Corporation of America
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(L) M type plug connector (M) Type 21R Manifold,/ Top Ported inch (mm) Grommet (G), (H) Lead wire length L type plug connector(L) M type plug connector (M) 8.60 (?

How to order L E C C G 2 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 40 8.

W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

HEC-OM-S008 First edition Aug.2014 Rev1.2 May.2017 C Co om mm mu un ni ic ca at ti io on n M Ma an nu ua al l THERMO-CON Model No. HECR series Keep available whenever necessary.

Applicable ba", size l ~ C95S-W Non-lube Speci Icatlons 1MPa~ 10.2k:gf/crn2 Bore size %32 J . 0'40 .1 .0'50 .L %63 ,.I . .0'80 1 %1 00 Action .-.

(P) 3 (R) L plug connector (L) VQZ200 N.C. 3 Port M plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.

Thread type Symbol Type Nil Rc Port size N F NPT 100 30 50 60 75 G Port size Symbol Nil H L L S L S L S Nil H L 02 03 04 $ $ $ $ $ $ $ $ $ $ $ $ 1/4 3/8 1/2 $ $ $ $ $ $ $ $ $ $ $ $ Component equipment 100 30 50 60 75 Component equipment Nil H L L S L S L S Nil H L Mist separator AFM40 AFD40 Micro mist separator GD40-2-01 Differential pressure gauge AR40 Regulator Replacement Parts (Element

of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area (mm2) Effective area (mm2) AS ASP Number of needle rotations Number of needle rotations ASN Construction AQ Meter-out type M5 type U10/32 port AS3200-02 ASV w e t o u q !

Porting specifications 4(A), 2(B) port Port size Applicable valve model Base model Wiring 1(P), 5(R1) 3 (R2) 4(A) 2(B) Stations Plug-in type VV5ZS2-51F VV5ZS2-51G 2 to 16 stations With D-sub connector With attachment plug lead wire Rc VZS250-FZ 1 8 Rc 1 8 Side Grommet L plug connector M plug connector K plug connector C4 VZS250G L M KZ Non plug-in type VV5ZS2-51 2 to 24 stations C6

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

PV/V port size Nil Y M6 x 1 (Option) M5 x 0.8 Nil L Without lock nut Pilot valve With lock nut DC: 1 W (With indicator light: 1.05 W) AC DC: 0.45 W (With indicator light: 0.5 W) Vacuum switch electrical entry Nil Nil Lead wire length 0.6 m Grommet type L C Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Without connector (Without lead wire) Y Caution CL Only 24 VDC and 12

Lead wire length symbols: 0.5 m Nil(Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are applicable auto switches other than the above, refer to page 538 for details. For detail about auto switches with pre-wired connector, refer to pages 1328 to 1329.

Series VXR21/22/23 Dimensions Normally Closed: VXR210/220/230 Normally Open: VXR212/222/232 Grommet: G Port size Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 59 60 60 Port size P Rc N Q L K J H F E A B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80

(Individual exhaust for Pilot valve) L LN Connector (0.3 m) Connector (W/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (W/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) Rated voltage 1 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 1 W (With indicator light: 1.05 W) 24 VDC and 12 VDC are applicable to 0.45 W.

SIGNALS AND WIRING 3.10.2 Power supply cable wiring diagrams (1) LE-series servo motor (a) When cable length is 10m or less 10m or less MR-PWS1CBL M-A1-L MR-PWS1CBL M-A2-L MR-PWS1CBL M-A1-H MR-PWS1CBL M-A2-H LE-CSMDriver Servo motor Servo amplifier CNP3 AWG 19(red) AWG 19(white) AWG 19(black) V U U V M AWG 19(green/yellow) W W (b) When cable length exceeds 10m When the cable length exceeds

(mm) 2 Effective area (mm2) Weight (g) D L Q Model D KJT02-00 6 10 4.9 8.8 0.9 1.7 Q Q 3.2 5.2 Q M Q L D D M M L L Male branch tee: KJY T H A Applicable tubing O.D.

Series VXP21/22/23 Dimensions Normally Closed: VXP2270/2380/2390 Normally Open: VXP2272/2382/2392 Grommet: G Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 60 62 62 Applicable N Q L K J B C H F E D A flange M N 25.5 28 28 M 84 (94) 95(105) 106(117) N 41.5 44.5 44.5 M 84 (94) 95(105) 106(117) M 84 (94) 95

How to Order Vacuum Pump Unit ZQ1000 U 5 K1 L EA u i o G q w e r t y !0 !2 !1 q Body type U M For single unit For manifold w Solenoid valve combination (Refer to Table (1).) r Solenoid valve rated voltage (Refer to Table (1).) e Pilot valve (Refer to Table (1).)