High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H
2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
(mm) a = Internal cross section of piping [mm] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 QC = Air consumption required for one reciprocation of Mini-Rotary Actuator [l (ANR)] 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 10 7.5 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7 127 16 13 133 16.1 204 21.6 366 27.6 598 Air Consumption
D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,
RR1 CL1 MLGC CNG I Type Single Knuckle Joint MNB CNA MM A2 8 NDH10 Material: Cast iron (mm) CNS Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part no.
1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.
(mm) a = Internal cross section of piping [mm] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 QC = Air consumption required for one reciprocation of Mini-Rotary Actuator [l (ANR)] 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 10 7.5 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7 127 16 13 133 16.1 204 21.6 366 27.6 598 Air Consumption
PSE3 0(T) PSE3 1(T) NPN open collector output: 2 outputs NPN open collector output: 2 outputs Max. 30 V, 80 mA Residual voltage 1 V or less Max. 30 V, 80 mA Residual voltage 1 V or less Analogue output: 1 to 5 V Output impedance: Approx. 1 k Analogue output: 4 to 20 mA Max. load impedance: 300 (12 VDC) 600 (24 VDC) Min. load impedance: 50 PSE3 2(T) PSE3 3(T) Auto shift input Voltage
21 10 54.7 22.6 17 47 M14 x 1 16.8 KK4P-06E 4.7 17 6 12.8 30.6 10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1 23 22 12 50.9 60.1 KK6P-12E 9.2 86.1 41.2 31 1/2 30 32 24.5 M28 x 1.5 62.6 -16E 13 25 16 106.2 125.0 6 S e r Dimensions/Socket (S) Male thread type A2 A1 T D H L L (mm) A2
8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part No.
Female thread type Female thread type L1 L1 T 20 27.2 13 T Width across flats H Width across flats H H Width across flats 103 H Width across flats 27 T Connection female threads T Connection female threads Effective area mm Min. bore Weight g Model Effective area mm Min. bore Weight g Model L L Rc 1/4 Rc 1/4 47 35.5 KK13S-02F KK13P-02F 17 10.5 25.7 22 Rc 3/8 32 Rc 3/8 107 52 39 -03F -03F
0 t MHZ MHF MHL MHR MHK Description Material Note Component Parts !8 !9 @2 @0 @1 No.
CS2 XA0 to 30 Standard type Double acting double rod CS2 CS2W XA0 to 30 < = < = Smooth cylinder CS2Y Double acting single rod XA0 to 30 Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 Symbol: A4 C DA C0.5 30 RD 30 30 A H H H W1 H L T H Symbol: A8 Symbol: A9 Symbol: A5 Symbol: A6 Symbol: A7 C 0.5 file chamfer AL B MM RD B AL MM AL MM WA C DC 30 H 30 H 30 30 L W H W1 T H H Symbol: A10 Symbol:
D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.
29.8 051.5 3.6 46.7 25.2 07 1.4 28.5 090 RB1007 53.5 30.1 45.0 072.5 5.0 67.3 36.3 12 0.9 39.0 128 RB1412 83.5 36.1 70.5 108.0 6.0 73.2 36.2 15 0.9 43.0 178 RB2015 Shock absorber for high load + Adjusting bolt MY3B Bore size Stroke H (Shock absorber stroke) T S EY EC SD E W FC TU Stroke adjusting unit h TT (mm) E EC FC h S SD T TT TU W Shock absorber model EY Applicable cylinder MY3B16 MY3B25
Nil Without lead wire M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts
C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S
T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.