Aluminum High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

12 V 100 V 200 V 110 V 220 V Part no.

CM2

24 V 100 V, 200 V DIN terminal Relay, PLC Diagnostic indication (2-color indication) B59W Grommet H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 2-wire IC circuit 5 V, 12 V Terminal conduit 12 V Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication

CRB2/CRBU2/CRB1

CRBU2W-SE Free-Mounting Type CRBU2 CRB2 CRBU2W10-SE CRBU2W10-S CRB1 (mm) (depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 0.004 0.012

XL

Valve seal Assemblies XL(A, C, H) [V]-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

SX

ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

SY

(16 outputs) S-Link (8 outputs) T Link Mini DeviceNet CompoBus/S (16 outputs) CompoBus/S (8 outputs) JEMANET J1 J2 K Q R1 R2 U V CC-Link SS5Y3-45SA-05U-C6. 1 set (Type 45S, 5 station manifold base with serial unit part no.)

Hydraulic

V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W V 2 E = () 2 1000 Note 2) Consider made-to-order products, depending on an operating condition. Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)

Rotary Actuator/Vane Type

99 V Angle Adjustment Setting Page 100 V Auto Switch Mounting Page 102 51 Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

J79W F7BA 200 V 100 V Relay, PLC Yes 2-wire 12 V Connector 24 V Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC 24 V Water resistant (2-color indication) 12 V 2-wire Grommet With diagnostic output

Secondary Batteries

P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35 P.36 P.37 Reed Auto Switch Direct Mounting Style Auto Switch Mounting Bracket Part No. 1 Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1

Table of Contents

P . 27 P . 28 KQ2L KQ2U Use to branch line in the same direction. How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

Integrated Controller

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/10 = 0.03 [s], T3 = V/a2 = 300/10 = 0.03 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

LEC-OM07605CN

V DOCOM DOCOM RA RA (FR-BIF) (UVW)(UVW) U U U U V V M V M V W W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3

MGP

or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 10 1 5 0.5 25 25 20 Load weight m (kg) 20 Load weight m (kg) 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg) 50 5 10 50 40

Cylinder with Lock

F 6 CP96N/C96N Series Selection Graph Graph b Graph x 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 Load mass m [kg] Load mass m [kg] 63 63 50 50 40 40 50 50 32 32 32 32 10 10 1 100 500 400 300 200 1000 1 100 500 1000 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa