Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Fixed Unit: kPa, MPa, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

VS 8-2/VS 8-4

EVS1002-13-11H Gasket 1 AXT632-17-7 (M3 x 30, with washer, nickel plated) Hexagon bolt 2 EVS1001-9-1 Light cover 3 29.5 x 1.2 O-ring 4 OR-0500-130-H O-ring 5 29 Series VS 8-4 S R Construction Construction Metal seal Rubber seal VSS8-4-FG-SVSR8-4-FG-Sr e r e w t q t q w VSS8-4-FG-DVSR8-4-FG-De r r e w q t t q w VSR8-4-DFHG FIG FJG VSS8-4-DFHG FIG FJG e r r e t q w t q w VSR8-4-DFDAG FDBG FDCG

30

-04S 13.5 12.3 16.3 14.1 12.2 16.2 16.1 15 16.1 17.9 21.4 17.6 18.6 22.4 23.2 17.9 22.2 25.8 19.6 22.3 28.5 23.1 16.5 15.4 21 17.1 15.3 20.9 19.1 18.1 20.8 23 24.5 22.3 23.7 25.5 27.9 23 28.6 30.5 24.7 28.7 33.6 29.5 3 3.4 6 17.8 5.3 5.6 17.2 8 7.3 15.2 28.8 M5 x 0.8 1/8 1/4 3.2 12 8 3.4 M A L H 4 M5 x 0.8 1/8 1/4 10 Connection thread 4 12.6 8.7 5.6 4 14 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Large Size Vacuum Module: Series ZR

pressure supply (PD) port M5 EXH PE PE PD PD A 81.5 80.8 PD PD PS PS 56.5 PV PV 52 50 PD PS 42 35.5 31.5 33 28 16.5 13.5 17 PV PV PV 12 Common exhaust (EXH) port 1/2 (Rc, NPTF, G) Common release pressure supply (PD) port 2 x M5 Pilot pressure supply (PS) port M5 3 1.5 1 Common pilot supply (PS) port 2 x M5 4.5 2.5 Air pressure supply (PV) port Rc 1/8 7.5 7.5 Release pressure supply (PD)

Modular F.R.L. Unit

e Drain cock with barb fitting: 6 x 4 nylon tube W AC25 to 60 q w Note 3) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) q w Z AC10 to 60 w q e When more than one specification is required, indicate in ascending alphanumeric order.

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Non Plug-in 2 Position single Grommet: VFS2110-G-01 02 3 x Rc , 1 8 1 4 2 x 5 mounting hole 1(P), 4(A), 2(B) bottom ported Manual override (Non-locking) 2 x Rc 1 8 3(R2), 5(R1) bottom ported SJ SY Bottom ported SV 300 (Lead wire length) SYJ SZ VP4 S0700 A, B VQ Pilot EXH port M5 x 0.8 (External pilot port M5 x 0.8) VQ4 VQ5 ( ): Rc 1 8 VQC Grommet terminal: VFS2110-E-01 02 DIN terminal:

Compact Cylinder with Lock Series CLQ

130 85 MNB -45D -45D x 100 L x 115 L x 135 L x 90 L 100 115 135 90 -50D -50D x 105 L x 120 L x 140 L x 95 L 105 120 140 95 CNA -75D -75D x 140 L x 155 L x 175 L x 100 L 140 155 175 100 -100D -100D x 165 L x 180 L x 200 L M5 x 60 L 165 180 200 60 CNS CLQB40-10D CLQB100-10D M5 x 75 L M8 x 90 L M10 x 115 L x 65 L 75 90 115 65 -15D -15D x 80 L x 95 L x 120 L x 70 L 80 95 120 70 CLS -20D -20D

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52 Type SS3YJ5-20 Body ported for internal pilot M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.47

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Electric Actuator

M4 x 0.7 thread depth 6.4 28 ( ) 0.025 0 3H9 depth 3 3.5 39.4 (L) Cable length y 250 (37) A (Table traveling distance) Note 2) (113.5) 37 27 40 (41) [39] 39 [(41)] Stroke 4 [2] 2 [4] (2.4) 7 65 9.2 [Origin] Note 4) Origin Note 3) Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.5 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Step motor Servo motor Cable length y 250 (155.5) 65 Motor

Rubber seal 5 Port Solenoid Valve Series SYJ5000

x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3B60 [N.O. valve x 2] SJ3B60 [N.O. valve x 2] SJ3B60K with back pressure check valve !0 y t r w e u w !2 i !

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 107 19 16 22 75 40 M8 x 1.25 depth 16 37 160 34.5 50 140 8.6 14 depth 10 M10 x 1.5 depth 18 142 25 19 22 110 45 M10 x 1.5 depth 20 42 194 37 80 170 10.5 17 depth 12 M12 x 1.75 depth 21 Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21