• , I tube 0.0 I"P ,L (mm) (mm) " oS 1 1:M5xO,8 I:M8Xl' Model M tC D E D E oK oL y Model M .S y ZPR06B 6 7 2S 20 6R5 25 7t5 3,3 9,1 4 a 9 4,7 ml Applicable tube ,,~li<:abIe tube UJJ "P Q R ,~ .4 4 20.6 15,6 10.4 40~50 Bellows type Q I r--=~thacross flats '" (M6:a Ma:12)./' Width across flats 12 JrEE '2' "Applicable tube O.D P I Width across flats 12 II c..
Grease pack part number: GR-S-010 (10 g) CS2 Basic (B) P Bore size Stroke 20 25 20 CM2B P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 Width across flats B1 H1 H2 32 to 40 P Width across flats KA E (Head side pressure port) I G G NA D Q MM NN AL N N F K H A P QY NA ZZ + Stroke S
(D, Y) Manual override (Non-locking) Double Single VK 197.5 (3 position: 226.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 218.5 (3 position: 247.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 124) (3 position: 113.5) VZ (Pitch) (Mounting hole) VF 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH
How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !
Co., Ltd. 108 Type45A NA Manifold Options How to order interface regulators (SY3000/5000 only) Series SY5000 ARBY3000 05 Series SY3000 P 2 ARBY5000 00 P 2 Regulated port Regulated port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P port A port (P port control type A port regulated) B port (P port control type B port regulated)
R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R LONG STEM ELBOW: KQW/KQ2W 6mm CORNER MALE ELBOW: KQD/KQ2D CORNER UNION ELBOW: KQD/KQ2D 4mm R 14 & 6mm tube for union M A L E Y: KQUD/KQ2UD 4 x 4mm R 14 UNION Y: KQUD/KQ2UD 4 x 4mm 6mm S T E M Y: KQX/KQ2X 2 x 6mm 8mm P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C
Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.
After Improvement Nozzles are attached S1 S2 Nozzle 1.5 Effective area ratio Pressure loss: Small 3.5 : 1 1.5 P Work piece P Upstream side S: 22.6 Nozzle side S: 6.4 S: S = 3.5 : 1 1.5 4 0.25MPa 0.225MPa 0.002MPa Effective area (mm) P Effective area ratio Nozzle size (mm) Number of nozzles Regulator pressure (P) Outlet pressure (P) Collision pressure (P) S S The pressure that the work
hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90
P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302. N3 5/32" One-touch fitting 299 4/5 Port Solenoid Valve 10-SYJ3000 Note) CE-compliant: For DC only.
Locking type/Tool required SUP/EXH block plate Push type/Tool required SYJ Restrictor spacer Locking type/Manual External pilot 50/60 Hz 50/60 Hz Manifold SZ Grommet Plug-in VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ P.481 P.482 P.476 P.476 P.477 P.477 P.477 P.477 P.478 P.478 P.479 P.480 (Except S kit) (Except S kit) (Except S kit) (Except S kit) SQ VFS VFR VQ7 P.527 P.522 P.522 P.523
T I O N S A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT
V7 S B 3 M2 LEFB 32 q w e r y t u i o !
Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.
T I O N S A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT
VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.
Note 2) Bowl assembly for AWD30 and AWD40 comes with a bowl guard (steel band material). 14-2-84 85 Micro Mist Separator Regulator Series AWD20/30/40 Dimensions AWD20 M H T D U J N Panel fitting dimension Bracket (Option) S Y W IN OUT Z C Q P F.R.L.
1) S L, Z Refer to p.0-33 for Safety Instructions p.0-37 to 0-40 for common precautions.
A B P A B P A B P VFR3000 VFR4000 ARBF5050 VFR5000 1.0 MPa (1) 0.1 to 0.83 MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 =
YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.