HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

ISO Cylinder

Cushion Air cushion V Mounting bracket*1 Nil Rubber bumper (Standard) C Air cushion Applicable mounting bracket Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N Rod boot E V V V V V F V V V V Y V V V V Rubber bumper Nil Without rod boot J Nylon tarpaulin (One end) K Heat resistant tarpaulin (One end) Air cushion E V V

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

MY1

IC circuit 3-wire (PNP) 2-wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Yes Grommet 24 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V

MB1

D e D e Effective thread Effective thread 13 13 ZZ + 2 strokes S + Stroke 9 A K f N N f h + Stroke K A l + Stroke 9 l h Without air cushion S ZZ Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 84 84 94 94 114 114 13 14 15.5 16.5 19 19 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

LEF-OM002xx

0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s) V(mm/s) 10 - Step motor (servo 24VDC) Ball screw drive LEFS40 Model 150 to 1200 Stroke

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Sine Cylinder Series REC

= 200 mm/s Supply pressure: P = 0.5 MPa Load mass: M = 0.2 kg (2N) Cylinder stroke: 300 mm Load mass: M = 10 kg Cylinder stroke: 400 mm Actuating orientation: Vertical transfer of work (Rod side flange) Maximum speed: v = 300 mm/s Supply pressure: P = 0.5 MPa REC25 provisionally selected from graph (1) (M = 10 kg, v = 300 mm/s) REC20 provisionally selected from graph (1) (M = 0.2 kg, v =

Sine Cylinder Series REC

= 200 mm/s Supply pressure: P = 0.5 MPa Load mass: M = 0.2 kg (2N) Cylinder stroke: 300 mm Load mass: M = 10 kg Cylinder stroke: 400 mm Actuating orientation: Vertical transfer of work (Rod side flange) Maximum speed: v = 300 mm/s Supply pressure: P = 0.5 MPa REC25 provisionally selected from graph (1) (M = 10 kg, v = 300 mm/s) REC20 provisionally selected from graph (1) (M = 0.2 kg, v =

SX

3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 116 SX3000: Serial Transmission Unit/Plug-in SS5X3-45SStations UC4 C6 (Pitch) P = 10.5 DIN rail release button 2-One-touch

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

LVQ

T) V N M V LVQ30S, LVQ50S C B A D A B SMC U (Max. T) Z N M LVQ40S, LVQ60S C B A D (Max.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93 A93V 24 V 100 V Relay, PLC 2-wire 3-wire (NPN) M9N M9NV IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V F9NW F9NWV Relay, PLC 3-wire (NPN) Diagnostic indication IC circuit 5 V, 12 V 24 V Grommet Yes 3-wire (PNP) F9PW F9PWV (2-color display) F9BW F9BWV Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported V V V V V V Symbol Flow adjustment Rear

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

Thermo-con/Rack Mount Type

to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

CHKD/CHKG

CHN CHM Examples of D-A9(V), M9(V), M9W(V), M9A(V) models mounted on CHKD.

OMR0032

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.