Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 y !5 !4 @2 !3 w @4 @3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !7 !8 !1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (This eliminates wide variations of the indicated value.) 5% R.D.

Rotary Table/Rack & Pinion Style Series MSQ

0 y !6 !7 !8 !1 @5 er w@4 MSQ R (With internal shock absorber) CRA1 @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

EXxx-OMQ0015CN

(M45)(EX600-ZMB1) 2 EX600 0.70.8 Nm EX600-ZMB1 (2)(M4) 0.70.8 Nm M42 0.70.8Nm M42 1170.2 900.2 0.2mm n ()10 -12No.EX-OMQ0015CN DIN (SY SY ) (1)6 (M4X6)DIN (EX600-ZMB2) 2 EX600 0.70.8 Nm (2)M4X14EX600-ZMA22 0.70.8 Nm EX600-ZMA2 EX600-ZMB2 EX600-ZMB2 (3)DIN DIN (4)DIN (5)M4X20(EX600-ZMA2) 0.70.8Nm DIN DIN EX600-ZMA2 -13No.EX-OMQ0015CN M12 M8 M12 SPEEDCON SPEEDCON (1)(/)AB

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: B (Bracket B), Operation Manual/Calibration Certificate

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type])

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: None, Operation Manual/Calibration Certificate: K (Operation Manual + Calibration Certificate

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: B (Bracket B)

Tamper Proof and Flat Head Screw

ASD430F-02-08ST R 1/4 36.7 11 7 15 18.5 18.5 17 46.5 15.2 8 28.2 1.5 40.7 41.7 ASD430F-02-10ST 19.7 21 49.3 18.5 10 31 ASD530F-02-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-02-08ST 18.5 15.2 51.3 8 28.2 R 1/4 49.3 15.4 9.5 23 19.8 19 55.3 1.5 53.7 ASD530F-02-10ST 21 18.5 54.1 10 32.6 23.1 ASD530F-02-12ST 22 20.9 55.9 12 34.4 ASD530F-03-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-03-08ST 18.5 15.2 51.3

AS-FG/ASD-FG

) 1/4 28.2 46.5 34.4 11 29.4 15.2 18.5 ASD430FG-02-08S 10 31 19.7 49.3 18.5 21 ASD430FG-02-10S 6 25.2 48.3 12.8 17 ASD530FG-02-06S 20.3 28.2 8 51.3 15.2 18.5 ASD530FG-02-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 1/4 42.8 15.4 37.8 32.6 10 54.1 18.5 21 ASD530FG-02-10S 23.1 34.4 12 55.9 20.9 22 ASD530FG-02-12S 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23

Intrinsically Safe Valve

In the case of complex arrangement, specify them on the manifold specification sheet. 53 42 SS5Y 05 5 02 Manifold series Stations 5 7 02 53-SY5000 2 stations 53-SY7000 20 20 stations Thread type A, B port size Nil F N T Rc Thread piping G Symbol Port size Applicable series NPT 1/4 53-SY5000 53-SY7000 02 NPTF Warning If a resin tubing is used, take precautions against static electricity.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

(Mounting thread) Note) If the fitting attached to the port interferes with the auto switch, please use the extension fitting assembly supplied with the air gripper. 4 x AA thread depth AB (Mounting thread) Prepared hole diameter AC through (Mounting hole) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

CP95

9 @0 @1 @2 @3 @4 No. q w e r t y u i o !0 !1 !2 !3 Steel wire Chrome-molybdenum steel Steel Resin Urethan rubber NBR NBR NBR NBR NBR Rod cover Head cover Cylinder tube Piston rod Piston Cushion ring A Cushion ring B Bushing Cushion valve Snap ring Tie-rod Tie-rod nut Piston nut Replacement Parts: Seal Kit Bore size (mm) Kit no.

,

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position