Round Type Low Pressure Hydraulic Cylinder Series CH
M

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 14 5 20 18 M8 x 1.25 36 16 9 3.2 x 16l 20 CDP-1 9 +0.058 0 +0.2 +0.1 Y-03 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B A B A 0.6 P R R P R R Pilot pressure MPa Pilot pressure range SS5YJ3-41-03-M5T SYJA3140 SYJA3240 SYJ3000-21-2A 0.5 3 Position pressure center 3 Position pressure center 1pc. 1pc. 1pc. 1pc. 0.4 B A B A 0.3 P R R P R 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa 18 18 18 18 18 18 Air Pilot Drawings Series SYJ3000 (mm) Body Ported Type / Dimensions Base Mounted Type / Dimensions

Series VQ Base Mounted Metal Seal/Rubber Seal

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Stroke Reading Cylinder and Counter

x 1 4 x M6 x 1.0 depth 6.5 (Bottom 5.3 through-hole) 9.5 counterbore depth 5.5 (500 or 3000) 25 70 1.5 5 Width across flats 13 7 5 10 22f8 10f7 6 53 35.6 23 36 23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2 x M5 x 0.8 4 x M5 x 0.8 74 20 (Port size) Thread depth 10 114 + Stroke 31 145 + Stroke 2 D-X 653 CEP1 Series Dimensions: 20 4 x 5.5 Foot type: + 0.05 + 0.02 4 (Positioning pin hole) CEP1L20

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

Air Cylinder

1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 18 Not included for Option Z (Removed parts) 19 Not included for Options Z and Z1 (Removed parts) 18 HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR050-W-20-(DM)U(YZ) Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.59 Control method PID control

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

MHZ

Normally closed Normally open MHZL2-16S 16 12 27 145 MHW MHZL2-20S 20 18 33 290 Single MHZL2-25S 25 22 50 515 MRHQ 13 acting MHZL2-10C 10 8 70 38 MHZL2-16C 16 12 140 Single acting, Normally closed Misc. 57 MHZL2-20C 20 18 290 85 MHZL2-25C 25 22 515 DNote 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Magnetically Coupled Rodless Cylinder

Refer to page 18 for auto switch circuit diagrams.

MHZ

9@0@2 MHZA-A0603C MHZA2-6C MHZA-A0607 MHZA2-6H Main body of adaptor Mounting screw for adaptor Seal kit MHZA-A0608 MHZA2-6K End boss assembly MHZA-A0609 MHZA2-6M MHZA-A0610 MHZA2-6E 12-2-18 18 Parallel Style Air Gripper Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 Construction: With Dust Cover MHZAJ2-6 Double acting/With fingers open Single acting/Normally open @2 i !

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5 10 18

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

XL

Port S (10) remains pressurized and valve S (18) remains open.

7

S F D Q Grommet (with surge voltage suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (