Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

(RS1H50 : 10mm RS1H63 : 15mm RS1H80 : 18mm) 1410 Heavy Duty Stopper Cylinder Series RSH/RS1H Auto Switch Proper Mounting Position (Detection at Stroke End) Auto switch B A Auto switch proper mounting position (mm) Auto switch models D-M9 D-M9W D-M9AVL RSQ D-M9V D-M9WV D-M9AL D-Z7/Z80 D-Y59/Y7P/Y7W D-Y69/Y7PV D-Y7WV D-Y7BAL RSG A B A B A B A B A B A B Bore size RS 20 32 50 63 80 23 8.5 23

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

+ 1/2 stroke D E e C B AL H1 L RR1 B C CZ CX 10.2 f l F K A N BN Hole dia.: CDH10 h + l Shaft dia.: CDd9 H S + Stroke ZZ + l + Stroke ZZ + Stroke Z + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C CDH10 CX CZ D E F GA GB GC GD GL GR H1 Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 10 +0.058 0 15 +0.3 +0.1 29.5 16 32 10 85 15 26 54 10 10

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

TL TM TL TZ L1 TW 168-1 B C96 Series Accessories Dimensions: Mounting Brackets Axial foot (L) [mm] TG Bore size [mm] Part no.

VZS

A Single/ Double, A side 1 2 position single 2 2 position double G Grommet Grommet/With surge voltage suppressor 6 12 VDC B Double, B side 3 3 position closed center 9 Other GS 3A 3 position A side 4 3 position exhaust center Option 5 3 position pressure center Option L L plug connector Manual override Electrical entry, Light/Surge voltage suppressor 3B 3 position B side 6 3 position

Air Slide Table Series MXS

MTS Retraction End Body mounting section Table mounting section D E E1 H H Q L G K M B C J A MXS-BT8 P F MXS-BT20 MXS-BT25 MXS-BT8 MXS-BT12 MXS-BT16 N Body mounting section A Table mounting section Applicable size Model B C D E E1 F G H P K L M N Q J MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) MXS-BT8 (L) 38 23 12.5 14 40.8 5 8 12 1.4 M3 x 12 16.6 7 15.5 14.6 M3 x 16 M8 x 1 MXS-BT12

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Combination Cylinder

(mm) B C D d H Dd9 Tube dia. (mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

CJ2

Bore A1 L L1 MM Part No. B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

CATALOG VC10

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

Mini Free Mount Cylinder

Without Auto Switch (Without Magnet) For Axial Mounting Cylinder model Mounting bolt size For Lateral Mounting Cylinder model Mounting bolt size Material: Structural steel Material: Structural steel A B M4 x 25 l M4 x 30 l M4 x 35 l M4 x 40 l M4 x 45 l M4 x 50 l M4 x 25 l M4 x 30 l M4 x 35 l M4 x 40 l M4 x 45 l M4 x 50 l M5 x 30 l M5 x 35 l M5 x 40 l M5 x 45 l M5 x 50 l M5 x 55 l M5 x 60

VQ4000

B 2 B 2 B 2 B 2 B 2 B 2 B B B B B B B B B A A A A A A A A 8 VQZ SMC SMC SMC SMC SMC SMC SMC 7 VQD 6 5 L2 L1 4 3 2 P = 25 P = 25 1 50.5 44 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side 37.5 10.2 12 106.5 43.5 178.5 50.5 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum 16 stations) L n 9 288 301 8 263 276 L1 L2 7 238 251 6 213 226 5 188 201 4 163 176

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

CNA

T l N U BN CXW CX h + l l Z + Stroke L RR H Z + l + Stroke l Z + Stroke ZZ + Stroke l CZ CXS ZZ + l + Stroke lB (mm) CXT Stroke range (mm) Bore (mm) J K KA A AL B B1 BN BP BQ C CX CD D E F GA GB GC GD GL GL1 GR H1 CZ MX +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 40 50 63 80 100 6 M8 X 1.25 14 30 27 60 22 96 1/8 1/8 44 10 29.5 16 32 10 85 15 52 16 12 12 10 8 15 to 500 7 M8 X 1.25 18

Mechanically Jointed Rodless Cylinders

, where X417 is mounted on L unit only and nothing on H unit MY3B25-300LH-X417L B M Note) The holder mounting bracket can be used on both the left and right side of the L and H units.

New

VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<B B D C D C J J K I K I R Q z 300 S z 300 Q R S L L E E U U 1/4 Exhaust port 1/4 Exhaust port H H F F G G 2 x P Port size 2 x P

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

= 20 mm, for 32 to 63 with gripping point L = 30 mm, and for 80 with gripping point L = 50 mm.

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

90

Switch for Vacuum Specifications) B C D J K P L W (without supply/release valve, without switch, pressure sensor) KJR KJRN L to L3 C to L3 06 P 560 56 P to J N 00 i Optional Specifications/Functions/Applications Note 19) Q 08 Type Function/Application Symbol Nil L to N A 07 ZK2 07 Without option B 10 09 Bracket P to N C to N With one bracket for mounting a single unit (Mounting screw is

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...