PF2A/PF2W

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

-fl Seies

N SUP gEllery block disc: AXT634-10A ExH gallery block disc: Axf634-11A d N l --Jh tml o.r7 u j ltllill (4.2)i-l...0.86(2r.8) .o.t7* " "<0?

MGP

Nil High precision ball bushing S 1 pc. n "n" pcs.

2 Phase Stepper Motor/Without Motor Brake Series LXS

x P 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

High Purity Fluoropolymer

Model H G F L M N E B (E) 2-B 4 6 LQ2T22 LQ2T21 4 6 L 18 19 12 34.5 19.9 1/4 10 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) 43 SMC 5 6 8 24 22 9 18 26.2 52 42.5 (E) (E) G H 12 19 10 12 L L 6 30 28 11 22 33.1 21 59.5 51 Class 2, 3 7 36 32 14 28 40 46 58.5 (M) N Inch sizes Applicable tubing O.D.

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

Vacuum Unit

L Molded cover 2 x M2.6 x 0.45 16 44 8 (2.4) Connector DB-25SF-N Japan Aviation Electronics Industry, Ltd.

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

N SUP gEllery block disc: AXT634-10A ExH gallery block disc: Axf634-11A d N l --Jh tml o.r7 u j ltllill (4.2)i-l...0.86(2r.8) .o.t7* " "<0?

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

) port B B1 G G 2 x M thread depth N 2 x M thread depth N WN: M12 connector D K F C J E IN B1 B 2 x Port size 1(IN), 2(OUT) port A G 2 x M thread depth N Glossary of Terms [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5 8 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K

CXS

Z I M 1 G 0.2 (G) A H P 6.3 5 NN OO (Hexagon head bolt) PP (Hexagon nut) E N X (Hexagon socket head cap screw) F (Through) V (Opposite side: Same) (L) (Z) TT QQ (G) T Q U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0

CNS

MM D EA E AL A K F VA BN S + Stroke CX CT N N U L RR H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZZ + Stroke Z + Stroke (For NPT port) CL T 2-MA Thread effective depth R GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke Bore size

HEC_W-E

When the temp. set in this item is reached, the alarm [ERR13] arises. 8-7 Operation 8.6.2 Setting mode, Level 2 F i n e C o n t r o l o f I n t e r n a l S e n s o r M O D E < 0 . 0 7 C 1. Fine Control of Internal Sensor Setting range : -9.99 to 9.99 C Min. increment : 0.01 C Indicated content : Fine adjusting value for internal temp.

Cylinder with Lock Series CLS

Rc(PT) 1/4 Unlocking port (unlocked when pressurized) GC BB BA Plug with breathing hole Width across flats KA 2-Rc(PT) P M GA GA MM CD hole H10 Shaft d9 BZ GB 4-J 90 D 59 30 W 14 AL CX 5 A K CT N N U 43 C L S + Stroke H BY B RR Z + Stroke ZZ + Stroke With rod boot 75 l 15 40 h + l Z1 + l + Stroke ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 A AL B BA BB BC BY BZ C CDH10

MGG

"n" pcs. Nil S n Bearing type Slide bearing Ball bushing M L Auto switch type Mounting type Without auto switch (built-in cylinder magnet) Basic Front mounting flange Nil B F Refer to the table below for auto switch models.

Cylinder with Lock Series CNS

BC element M GA Rc(PT) BP GB G G FA Unlocking port 2-Rc(PT) P Cylinder port Width across flats KA MM D EA E VA AL CX CZ CT N N U A K F BN L RR S + Stroke H ZZ + Stroke Z + Stroke 2-MA Effective thread depth R CL T GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CDH10 CL CT CX CZ D E EA F FA 125 140

Series VQ Metal Seal/Rubber Seal Body Ported

L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

NCA1

C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact SMC Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB F G M N X D E C L S O R P U J T B BA BB BC ME3 Head Square Mount (8 to 14) ME4 Cap Square Mount (8 to 14) MF1 Front Flange (1.5 to 6) MF2 Rear Flange