MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

PF2A/PF2W

Port size Applicable model Flow rate (l/min) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Specifications PF2A703H PF2A706H Dry air Heater type 300 to 6000 l/min PF2A712H Model Measured fluid Detection type Flow rate measuring range Note 1) 600 to 12000 l/min 10 l/min 150 to 3000 l/min 5 l/min Minimum setting unit Note 1) l/min, CFM l, m3, m3 x 103, ft3, ft3 x 103

HRX-OM-W002

21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2

CG5-S

41 10.5 20 25.6 30 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 10 10 18 18 I-G04SUS Y-G04SUS 40 40 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 14 14 22 22 I-G05SUS Y-G05SUS 50, 63 50,63 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x 1.5

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

ZP

Q ZP T 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 40 50 A14 06 19.9 12 6 3 08 24.9 14 8 Width across flats P N N Dimensions Per Vacuum Inlet: Barb Fitting Model N P Fitting part min. hole size Vacuum inlet direction q Pad dia.

HRX-OM-X084

State (7): AL.14 report since 45 sec has elapsed since the circulating fluid temperature deviated, because it is outside the upper temperature monitoring range. TEMP OUT output ON. State (8): The alarm is reset manually, the temperature monitoring upper and lower limit range is out, so "AL.14", "AL.15" warning continue.

air-filter-e

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Air Preparation Equipment

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Stations L1 L2 L3 L4 2 123 112.5 91.5 15.5 3 4 5 6 7 8 9 10 148 137.5 123 12.5 173 162.5 144 14.5 198 187.5 165 16.5 135.5 125 102 16.5 160.5 150 133.5 13.5 185.5 175 154.5 15.5 210.5 200 175.5 17.5 148 137.5 112.5 17.5 Stations SS5X3-45GDBC4 C6 Stations L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 160.5 150 129 15.5 185.5 175 150 17.5 185.5 175 160.5 12.5 210.5 200 181.5 14.5 148 137.5

HRX-OM-X071

output is set) Elapsed time Alarm manual reset Alarm manual reset State : An alarm "AL.14" is issued when the chiller is activated.

Precision Cylinder Series MTS

With end lock 3 124.5 + Stroke 145.5 + Stroke Basic type With end lock Accessories SMTS25, #1 (#1 + #2) SMTS25, #2 (#2 + #4) SMTS25, #3 8 Series MTS Dimensions/32 MTS32 73.5 18 14 69.5 2-cushion needle Basic type Width across flats 14 8 6 Rod cross section 2-Rc 1/8 (port size) 7 7.5 M8 x 1.25 38 0.2 17 20 +0.015 0 26 0.2 5 0 0.018 4-5.5 through 2 x 4-9, counter bore depth 5.5 (opposite

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Refer to Replacement Actuator (Cylinder) on page 8-16-14 about how to order . 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Refer to Replacement Actuator (Cylinder) on page 8-16-14 about how to order . 2.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

S 24 M5 x 0.8 (Finger closing port) 42 8 3 4 3 MHY2-25D2 Opening/Closing direction through-hole type 4-5.5 (Hole for mounting attachment) 12 0.005 0.025 6 12 22.5 (Limted area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 12-10-14 14 180 Angular Style Air Gripper Cam Style Series MHY2 Mounting