CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Table of Contents

21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch unit) Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

AS-FG/ASD-FG

of 0.5MPa and a temperature of 20C. 7 Series AS-FG How to Order AS 200 1 F G 06 Body size Applicable tube outside diameter Metric size Inch size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 With One-touch fitting Use a 1/8" tube.

Sine Rodless Cylinder Series REBR Direct Mount Type

, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

JXCx-OMT0028CN

200 mm/s mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

240

kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100

Compact Guide Cylinder

(12 x 2) 20 (16 x 2) 25 (20 x 2) 0.06 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 0.05 63 (45 x 2) 80 (56 x 2) 0.04 100 (71 x 2) 80 (56 x 2) 63 (45 x 2) 100 50 (40 x 2) 40 (32 x 2) 32 (25 x 2) Load mass [kg] 25 (20 x 2) 20 (16 x 2) 10 16 (12 x 2) 12 (10 x 2) 1 0 50 100 150 200 250 300 350 Maximum speed [mm/sec] 5 Compact Guide Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x 2) Standard: JMGPM

CG1

22 26 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Effective after being energized for more than 200 ms when the voltage is applied 1. Power saving circuit The power saving circuit (PWM control) built into the product reduces power consumption via high-speed switching operation with the PWM control circuit after the rated voltage has been applied for approx. 200 ms when energized.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Dimensions page 22 (Single unit) 16 17 Series VX21/22/23 For Air /Manifold (Inert gas, Non-leak, Medium vacuum) Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

MGC

70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

HRX-OM-S004

PV SV 16. Set communication speed (serial communication protocol) with [] key or [] key, and press [SEL] key to enter.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

CRB2/CRBU2/CRB1

12 113 12.7 127 16 13 133 16.1 204 Required Air Capacity Required air capacity is the volume of air that is required to operate the rotary actuator at a certain speed.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.