Battery-less

External Gripping State Internal Gripping State H : Overhang L : Gripping point H : Overhang L : Gripping point L L Gripping position H Gripping position H LEHF32 LEHF40 120 100 100 80 Overhang H [mm] Overhang H [mm] 80 40% 60 40% 60 40 Pushing force 100% Pushing force 100% 70% 70% 40 20 20 0 0 20 40 60 80 100 0 0 20 40 60 80 100 120 Gripping point L [mm] Gripping point L [mm] * Pushing force

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

: A6 Symbol: A7 WA C C0.5 file chamfer AL B RD B AL MM AL MM MM DC 30 30 H 30 30 L W H W1 T H H H Symbol: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol:

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Electrical entry G H L LN LO M MN MO Grommet (Lead wire: 300mm) Grommet (Lead wire: 600mm) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector L plug connector M plug connector 2.2-9 Series SYJ300 Body Ported Grommet (G), (H): SYJ3l2-l G H ll-M3 With bracket: SYJ3l2-l G H ll-M3-F 28.4 2-3.5 22 3.2 Manual override (Mounting holes) 28 Depress

LEC-OM02704CN

RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

7ND9071en

Output: Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H.

VZ100/300/500

Description Solenoid assembly Material Note Epoxy Stainless steel DXT170-AVZ110 t 1(P) (SUP port) 1(P) (EXH port) Epoxy Stainless steel Solenoid assembly DXT170-EVZ120 y u Common with Series VZ 00 3 5 3(R) (EXH port) 3(R) (SUP port) 13 x 11 x 1 NBR O-ring 4-6-6 7 3 Port Solenoid Valve Rubber Seal, Body Ported Series VZ100 Body Ported Grommet (G), (H) VZ10-M5(-F) G H (Mounting hole) V100 SY

Cylinder with Lock

: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 46 CP96N/C96N Series Symbol Change of Rod End Shape 1 -XA0 to XA30 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol

Electric Actuator/Slider Type

LE-CSM-R is MR-PWS1CBL M-A -H manufactured by Mitsubishi Electric Corporation. LE-CSB-R is MR-BKS1CBL M-A -H manufactured by Mitsubishi Electric Corporation.

CL

D C B H d Tube I.D.

Proposals for Energy Saving

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H Sensors Measuring Instruments ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( )

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Applicable bore size (mm) 12 16 20 25 32, 40 50, 63 80 100 Dd9 d H B C Part no.

Tie-rod Type Hydraulic Cylinder

J H N M Spring pin Applicable cylinder type Order no.

CNA

X Y BN N T LX h + l S + Stroke LS + Stroke ZZ + Stroke Z ZZ + l + Stroke B Long Stroke When stroke exceeds 1000 mm, mount tie-rod support ring.

CNA

X Y BN N T LX h + l S + Stroke LS + Stroke ZZ + Stroke Z ZZ + l + Stroke B Long Stroke When stroke exceeds 1000 mm, mount tie-rod support ring.

Electric Actuators

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order Clean Room Specification Series LJ1H10 High Rigidity Direct Acting Guide Type Motor Output: 50W/100W How to Order Motor output: 50W F P 2 B 1 X60 Stroke 1 LJ1H10 Horizontal

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

I Type Single Knuckle Joint Rod End Nut (Standard) NDH10 30 MM 45 RR1 d E1 D C A1 L1 U1 NX H B A [mm] Material: Free cutting sulfur steel [mm] Material: Rolled steel Applicable bore size [mm] A A1 E1 L1 MM NDH10 NX R1 U1 Part no. Applicable bore size [mm] B C D d H Part no.

5 Port Solenoid Valve SY Series

: SY3120(-F2) G H C4, N3 C6, N7 Foot bracket SY3120-F1 G H C4, N3 C6, N7 9.5 (For mounting bracket) 2-M3 x 0.5 depth 3.5 38 31 4 13.1 1.2 11.6 17 24 + G: Approx. 300 H: Approx. 600 (For mounting) 23.2 66.9 [69.1] 28.5 [35.5] (Lead wire length) 44.7 25 8.6 B A 10.2 Manual override 22.2 (For manifold mounting) 21.4 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 69.4

Series VQ Base Mounted Metal Seal/Rubber Seal

SI unit for 16 point Uni-wire H System (NKE.)