Modular F.R.L. Unit

36 60 48 54 AC40-06, AC40A-06 AC40B-06, AC40C-06 AC40D-06 40 72 62 62 Note 1) in the model numbers indicates a thread type.

A

37.5 70 65.5 50 54 54 8.5 10 .5 70 2.3 52.5 NAR5000 90 168 48 90 75.5 70 66 65.8 11 13 90 3.2 52.5 NAR6000 95 204.5 48 95 78 70 66 65.8 11 13 90 3.2 D I M E N S I O N S NAR2001 ~ NAR4001 Bracket Port Size Model Part Size A B C D E Bracket Dimensions N F G H J K L M NAR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 NAR25O1 1/4 3/8 53 102.5 25 48 32 30 34 34 44 5.4 15.4 55 2.3

MXS Series Air Slide Table

24.5 70 24.5 (mm) Stroke adjustable range Retracting 5 15 25 35 30 15 35 35 35 A dimension (Retracted side mounting) Extending Model MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 28 38 48 48 43 29 49 49 49 Shock absorber at retraction end Stroke 100 to 150 Shock absorber at extension end A Max. 40 Shock absorber at retraction end Dimensions not indicated

Stopper Cylinder

Cancel cap Mounting: Both ends tapped RSQA O1 thread [mm] Bore size B O1 R 32 48 M6 x 1 10 40 52.5 M6 x 1 10 50 54 M8 x 1.25 14 B + Stroke R R * Dimensions other than those shown above are the same as the drawings above.

STEP MOTOR CONTROLLER, ELECTRIC ACTUATOR CONTROLLER, N31, 0.23 lb

C76

Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48

ZP

Form w 1 Material e Vacuum inlet r Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Connection M5 x 0.8 thread B 10 B5 41 25 2.5 M5 x 0.8 5 16 42 26 25 48 30 3.5 10 N S U F GN GS N4 N6 U4 U6 41 25 2.5 M6 x 1 6 16 42 26 25 48 30 3.5 40 57 39 6 25 B8 48 30 3.5 M8 x 1.25 8 40 57 39 6 ZP Y D C2 B6 Construction p. 117 Adapter Assembly p. 123 Dimensions Per Vacuum

Auto Switch Guide

Reed switch LED OUT () Blue OUT (+) Brown Resistor Zener diode D-A54 Weight Zener diode Choke coil (g) Resistor OUT () Blue OUT (+) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model Reed switch LED 24 24 24 0.5 Lead wire length (m) Surge absorber 48 48 48 3 96 5 D-A56 Dimensions DC (+) Brown LED (+) Resistor Load Reed switch OUT Black Reverse current prevention diode DC power supply () DC

C76

Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48

Auto Switch Guide

Reed switch LED OUT () Blue OUT (+) Brown Resistor Zener diode D-A54 Weight Zener diode Choke coil (g) Resistor OUT () Blue OUT (+) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model Reed switch LED 24 24 24 0.5 Lead wire length (m) Surge absorber 48 48 48 3 96 5 D-A56 Dimensions DC (+) Brown LED (+) Resistor Load Reed switch OUT Black Reverse current prevention diode DC power supply () DC

10

Bore size [mm] Bolt Width across flats [mm] Tightening torque [Nm] 32, 40 MB-32-48-C1247 4 5.1 50, 63 MB-50-48-C1249 5 11 Foot MB-80-48AC1251 6 25 Others MB-80-48BC1251 80, 100 125 Foot CE08 8 30.1 Others CE00032 4. When replacing mounting brackets, tie-rod nuts on the cylinder body become loosened.

Cylinder with Lock

Bore size [mm] Bolt Hexagon wrench size Tightening torque [Nm] 32, 40 MB-32-48-C1247 4 5.1 50, 63 MB-50-48-C1249 5 11 Foot bracket MB-80-48AC1251 6 25 Other MB-80-48BC1251 80, 100 2. When replacing the head side bracket, the tie-rod nut on the cylinder body also loosens.

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

SYJ300/500/700

VQ VKF VQZ L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (WO): SYJ74-WO01 02 VZ VS VFN Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48

VQ5000

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

MXS

CL 24.5 MLGC 70 24.5 (mm) CNA Stroke adjustable range Retracting 5 15 25 35 30 15 35 35 35 A dimention (Retracted side mounting) Extending Model CB 28 38 48 48 43 29 49 49 49 MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 Stroke 100 to 150 Shock absorber at retraction end Shock absorber at extension end A CV/MVG Max. 40 CXW Shock absorber at retraction

Speed Controller with Indicator

) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FS-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FS-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

3

1V 24 VAC 1K 48 VAC Conduit terminal With surge voltage suppressor Special voltage VXP VXR 1L 220 VAC 1M 240 VAC 1W 24 VAC 1P 48 VAC Conduit With surge voltage suppressor VXH VXF 1Q 220 VAC 1R 240 VAC 1Y 24 VAC VX3 VXA 2A 24 VDC 2B 100 VAC 2C 110 VAC 2D 200 VAC 2E 230 VAC 2F 48 VAC 2G 220 VAC 2H 240 VAC 2V 24 VAC 2L 100 VAC DIN terminal With surge voltage suppressor With light 2M 110 VAC

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

. : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48 1.1 33 1.6 t: Rotation time (s) 71 71 54 71 71 1.5 54 2.2 74 107 86 74 78 2.4 78 2.9 Rotary actuator 137 166 197 137 137 4.0 147 4.8 197 233 398 197 363 5.3 196 6.4 296 378 517 296 451 9.7 314 12.0 296 476 12.0 333 493