REA/REB

precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Part no.: SYJ700-10-2A-1-Q Gasket Applicable base Type 10-SS3YJ7-20-Q Type 10-SS3YJ7-21-Q Manifold base Part no.: SYJ700-10-2A-2-Q Gasket Applicable base Type 10-SS3YJ7-40-Q Type 10-SS3YJ7-41-Q Type 10-SS3YJ7-42-Q Manifold base 633 3 Port Pilot Solenoid Valve 10-SYJ700 Note) AC-type models that are CE-compliant have DIN terminals only.

AC

-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

ZP

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)

CV/MVGQ

D-C7/C80 50 + 45 (n 2) 50 10 15 15 + 45 ( ) n 2 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 10 15 (n = 2, 4, 6) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 65 10 15 65 + 50 (n 2) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 Precautions 75 10 15 Warning 75 + 55 (n 2) 20 + 50 ( ) (n = 2, 4, 6) n 2 2 D-B59W 75 15 20 1. Do not rotate the cover.

CV/MVGQ

D-C7/C80 50 + 45 (n 2) 50 15 10 15 + 45 ( ) n 2 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 15 60 10 (n = 2, 4, 6) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 15 65 10 65 + 50 (n 2) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 Precautions 15 75 10 Warning 75 + 55 (n 2) 20 + 50 ( ) (n = 2, 4, 6) n 2 2 D-B59W 20 75 15 1. Do not rotate the cover.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Battery-less

2 u r q !7 y Component Parts No.

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Rotary Actuator/Vane Type

Size: 40 Size: 10, 15 Size: 20, 30 A port B port q e t e !2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

ZP

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

Table of Contents

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

SY

B 2 to 17 2 to 10 2 to 10 D side U side D U B 2 to 8 2 to 8 2 to 8 D side U side D U For mixed specifications, order separately on a manifold specification sheet. Both sides M Special specifications Both sides M Special specifications For special specifications, order separately on a manifold specification sheet.

Hydraulic

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

One-touch Fittings Series KQ2

2 2 8 / 3 S 3 0 7 0 Y 2 Q K 7 1 5 . 9 2 5 . 9 2 5 3 8 / 1 S 1 0 9 0 Y 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 Y 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 Y 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 Y 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 Y 2 Q K 5 . 1 3 4 3 8 3 2 / 1 S 4 0 1 1 Y 2 Q K 2 2 5 . 5 3 5 . 6 3

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.