Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

1 2 5 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4

VY511, VYU5

control Robotic support K K Auto balance + Drive K K K K Lifter Parts assembly K K K K 1.15-29 Automatic Balancing with Three operations to accommodate a wide range of applications 1.

High Purity Fluoropolymer

Description Body class Symbol Bracket assembly LQ-GBL J K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L M L type M type (for short piping) Table 1 Tubing size symbols Part No.

VQZ1000/2000/3000

K (0.5 W) Low wattage type Note 1) Applicable to VQZ2000 and 3000.

240

[Nm] Roll moment [Nm] 388 Step Motor (Servo/24 VDC) Electric Actuator Miniature Slide Table Type LEPS Series LEPS6, 10 How to Order LEPS 10 K 50 1 1 R 6N q w e r t y u i o !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Wa = 1 x 1.2 = 1.2 Allowable load weight coefficient b: Graph (1) = 1 Max. allowable load weight Wmax: Table (2) Wmax = 1.2 1 = 0.2 / 1.2 = 0.17 1 = W/Wa Find the load factor of the load weight 1. 3-2 Load Factor of the Static Moment M = W x 9.8 (Ln + An)/1000 Moment center position distance compensation amount An: Table (3) Find the static moment M (Nm). Examine Mr.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

MK

Common (Standard) (mm) 20H J Model K L F E C B A D G Q V P Yh9 Z N I M O R S T U X 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 1 8 1 8 1 4 1 4 0 0.062 0 0.062 0 0.062 0 0.062 MK2B32 MK2B40 MK2B50 MK2B63 54 61 73 86 34 40 50 60 60 69 86 103 12 12 15 15 45 52 64 77 5.5 5.5 6.6 9 31.5 35 41 47.5 9 depth 7 9 depth 7 11 depth 8 Rc / Rc / Rc / Rc / 30 30 37 48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5