One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Table of Contents

110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Air Slide Table

MXQA-A2087 47 4.4 17 6 10 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A) MXQA-CS25 MXQA-CT25 MXQA-A2587 54 5.5 19 6 11 44 13.5 19.3 M14 x 1.5 M8 x 16 MXQ8B MXQB-CS8 MXQB-CT8 MXQB-A887 35 2 10 4 6.5 24 7.1 10.4 M8 x 1 M4 x 8 6.8 MXQ12B MXQB-CS12 MXQB-CT12 MXQB-A1287 40 2.8 12 5 8 29.4 9.2 12.6 M10 x 1 M5 x 10 8.8 MXQ16B MXQB-CS16 MXQB-CT16 MXQB-A1687 47 3.6 17 6 10 36 11.2 16.2 M12 x 1 M6 x

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber VQZ200 Rubber Metal VQZ300 Rubber Metal Note: The base mounted and body ported manifolds for the VQZ 100/200/300 are stocked in inch porting as part of the P.O.P. 7 Q Q Q Base Mounted Q Q Series VQZ100200300 Q Q Q Q Q Q Q Specifications Q Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .page 10 Manifold . . . . . .

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

Series AP500

q w q AP1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.

Vacuum Unit

1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

NCQ8

1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8

7

1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !1 o t o u B u OUT (P2) w C IN(P1) A r r OUT(P2) IN (P1) e e C w IN(P1) q q VXD27, 28, 29 VXD25, 26 Component Parts Operation When coil !2 is energized, armature assembly !1 is attracted by core i and pilot valve A is open.

MY1

5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 40.5 2 M5 x 0.8 9 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28 38.5

Thermo-chiller

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

ZP

1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat with ribs Deep Bellows Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Pad form Thin flat/Thin flat with ribs 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16 10, 16, 25, 40 Material (Color) NBR (Black), Silicon rubber (White), Urethane rubber

15

Vertical Mounting, Sliding Bearing q 70 mm stroke or less w Over 75 mm stroke 100 100 LEYG32M Load mass m [kg] Load mass m [kg] 10 LEYG32M LEYG25M 10 LEYG25M 1 1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed. Check the SpeedVertical Work Load Graph on page 866.

Auto Switch Guide

(Including bracket, screw) RS Q G Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 RS H A Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.