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(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11
Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: 1N (NPT1/8, PVDF), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Open, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power Consumption
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power Consumption
Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: 1N (NPT1/8, PVDF), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 10 (1000mm), CE Compliant: Q (CE Compliant)
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: 1N (NPT1/8, PVDF), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 10 (1000mm), CE Compliant: Q (CE Compliant)
Symbol: 20R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: 1N (NPT1/8, PVDF), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 10 (1000mm), CE Compliant: Q (CE Compliant)
Refer to Fig. (6) (for the meter-out mode). RS Q G RS H A RZQ MI W S CEP1 Fig. (4) CE1 CE2 Fig. (5) Fig. (6)
Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.
CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange
2 Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V A Servo motor (24 VDC) V V LECA6 r Lead [mm] Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8 10
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34
Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q
6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.
The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.