Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series MSQ Dimensions: Size 70, 100, 200 Basic

-fl Seies

j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s !

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s !

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Composite Center of Gravity Calculation m1 = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525 kg 1 m1 X = x (mn x xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5 mm 1 m1 Y = x (mn x yn) 1 6.525 = (0.88 x 0 + 4.35 x 0 + 0.795 x 111 + 0.5 x 210) = 29.6 mm 1 m1 Z = x (mn x zn) 1 6.525 = (0.88 x 5 + 4.35 x 42.5 + 0.795 x 42.5 + 0.5 x 42.5) = 37.4 mm 4.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(kg) 1.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Max. operating pressure difference MPa Port size Note 2) Note 1) Note 1) Effective area mm (Cv factor) Weight kg Max. system pressure MPa Orifice diameter Class Model 2 2.0 0.9 2.8 (0.16) 3 0.8 0.45 5.9 (0.33) 1/8 (6A) 1/4 (8A) 3.0 1/8: 0.21 1/4: 0.24 2 VCW2 4 0.5 0.25 9.2 (0.51) 5 0.3 0.15 11.7 (0.65) 3 2.0 0.8 6.3 (0.35) 4 0.8 0.42 9.7 (0.54) 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8:

CHKD/CHKG

J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5

33

Circulating Fluid Typical Physical Property Values 1. This catalog uses the following values for density and specific heat in calculating the required cooling capacity. Density r: 1 [kg/L] (or, using current unit system, weight volume ratio c = 1 [kgf/L]) Specific heat C: 4.19 x 103 [J/(kgK)] (or, using current unit system, 1 x 103 [cal/(kgfC)]) 2.

Guide Cylinder Series MGG

1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Air preparation filter

391.5 379.5 382 31.5 144 136 68 23 40 AFF,AM,AMD 80D 1 1/2 404 392 394.5 38 170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Size: 19 (3/4" or ø19), Pilot Port Thread: R (Thread Type 1/8 Rc)

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Size: 13 (1/2"), Pilot Port Thread: R (Thread Type 1/8 Rc)

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Tube Size: 19 (3/4" or ø19), Pilot Port Thread: R (Thread Type 1/8 Rc)

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Size: 13 (1/2")

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Size: 13 (1/2"), Pilot Port Thread: N (Thread Type 1/8"NPT)

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Size: 19 (3/4" or ø19), Pilot Port Thread: N (Thread Type 1/8"NPT)