High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

14 15 21.5 1/4" 36.5 PA PAX 21.5 1/4" 23 19 42.5 17 20 25 PB 3/8" 25 47.5 3/8" 28 23 21 24 29.5 50 1/2" 29.5 58.5 1/2" 39 32 26 29 36 60 3/4" 36 75 3/4" 49 36 46 39.5 44.5 78.5 1" 17-5-101 6 Series LQ1 Dimensions Male Elbow: LQ1L-M Metric sizes Connection threads R/NPT Model Applicable tubing O.D.

Microspeed Cylinder

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (basic

CE

J K B I Bore size (mm) 32 40 50 63 Standard stroke 64 131 27 16 45 49.5 M14 x 1.5 4.5 14 90 14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34

IDX-OM-W014

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

7

Different surfaces D-P3DWA D-P4DW D-P79WSE D-P74 24.5 50 50 50 12 D-M9 D-M9W D-M9A Caution D-A9 D-B54 50 50 75 As for the precautions on the auto switches, product specifications, refer to pages 437 to 439. Note 1) When two D-P3DWA are mounted to the cylinder with stroke 50 mm, mount them on different surfaces. Note 2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.

MXS Series Air Slide Table

F 2 5H9 5 deep +0.030 0 27 2-M6 X 1 thread 13 deep 13 M 0.5 45.5 50 Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 30 1.5 A B 5H9 5 deep +0.030 0 6 NN-M6 X 1 thread 12 deep 5H9 5 deep +0.030 0 HA GA Cross section AA Cross section BB (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Micro Mechanical Valve Series VM1000

39 38 21 30.5 1.5 1.5 Symbol 18.5 3 (B) 2 (A) 4 (161) (109.5) (140) 12 14 PE EA P EB 3 (EB) 1 (P) 5 (EA) B A 91 17.8 14 14 17 23.3 12.8 38 36 3 13 22.5 2 13.8 26.7 30 18 5 x 1/8 0.5 MPa supply 2 x 3.5 mounting hole T.T. 26 N F.O.F.

240

type LEPY Series Page 374 25 to 50 6.0 1.5 200 5 24 to 40 4.0 1.5 200 10 12.5 to 25 3.0 1.0 350 10 12 to 20 2.0 1.0 350 14 to 20 1.0 0.5 150 4 6 Slide table type LEPS Series 7 to 10 0.75 0.25 300 8 25 50 Page 383 25 to 50 2.0 1.5 200 5 24 to 40 2.0 1.5 200 10 12.5 to 25 1.5 1.0 350 10 12 to 20 1.5 1.0 350 370 LEPY/LEPS Series Mounting Variations Mounting from various directions Side mounting

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

Pin Clamp Cylinders

14 20 20 Round type 105 10.5 106 10.6 107 10.7 108 10.8 109 10.9 110 11.0 145 14.5 146 14.6 147 14.7 148 14.8 149 14.9 150 15.0 Diamond type D11 11 15 15 -X 531 C(L)KQG32 Series Dimensions CKQGl32 (Clamping height LOW type) The figures below indicate the CKQGB32-lRCL-X2081. 49.5 50 250.1 Mounting surface 19.8 32.5 Mounting surface position 50 52 Port side A Mounting surface 27 D 12.5 (Cylinder

Environment

At this position, 4 mm from the end of the operating range. 4 x 9 108 Double clevis: LEY63-D 8 [mm] 14 hole H10 axis d9 Stroke range [mm] DA CL 50 to 200 236.6 222.6 201 to 500 271.6 257.6 501 to 800 306.6 292.6 Included parts Double clevis Body mounting bolt Clevis pin Retaining ring 22 +0.4 22+0.2 37.4 0.1 440.3 DA + Stroke CL + Stroke 14 30 Material: Cast iron (Coating) * The overall

Ionizer

When using a feedback sensor at higher than 50 mm, refer to the graphs below.

MLGP

s (24) Over 50 Stroke V = 400 mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance 1 (mm) Eccentric distance 1 (mm) 9-11-14 14 Compact Guide Cylinder with Lock Series MLGP Horizontal Mounting (Slide bearing) MLGPM20 to 100 (25) l2 = 50 mm V = 200 mm/s (26) l2 = 100 mm V = 200 mm/s 50 50 100 CL 100 100 100 80 CL1

MLGP

Less V = 400 mm/s (24) Over 50 Stroke V = 400 mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance 1 (mm) Eccentric distance 1 (mm) 9-11-14 14 Compact Guide Cylinder with Lock Series MLGP Horizontal Mounting (Slide bearing) MLGPM20 to 100 (25) l2 = 50 mm V = 200 mm/s (26) l2 = 100 mm V = 200 mm/s 50 50 100 CL 100

MQQ

A + Stroke FZ (mm) Double clevis type/MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU Special cap bolt 10 to 40 CU CD hole H10 Shaft d9 90.5 61.5 5 84.5 4 10 10 10 to 60 107.5 70.5 8 98.5 5 12 16 10 to 60 119 79 10 109 5 14 20 10 to 50, 75, 100 126.5 84.5 10 116.5 5 14 25 10 to 50, 75, 100 148 104 10 138 6 14 28 CX +0.4 +0.2 CT B + Stroke CW CZ -0.1 -0.3 L Bore size (mm) CW CX CZ L

7

S CAC408 50 50A Flange R 230 VAC G N.O.

JXCx-OMT0005CN

(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.