Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9
(66.5) 40 0.28 20 0.14 0 0.00 0.69 (17.5) 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) A AP1200FC Inlet pressure:150 psig (1.0 MPa) 3/4 inch connections ) B 80 0.55 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) 0.88 (22.4) 70 0.48 Connections A B Delivery pressure (MPa) Delivery pressure (psig) inch (mm) inch (mm) 60 0.41 3.70 4.00 3.46 (94.0) (101.6) (87.9) FV4 MV4 TW4
Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.
No. of tubes Color Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Max. operating length m Model O.D. TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1 1.5 4 2.5 2 1 3 2 1 6 4 1.5 2 1 3 8 5 2 1 Best Pneumatics Best Pneumatics Refer to page 2.5-3 of No. 4 for details.
/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XLD-80 XLD-100 XLD-160 AC90240V XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300
port regulator) ARB310-00-B ARB210-00-B Can be made into manifold with series VV72.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D sealing, with thread): DXT060-32-4A 17-4-32 3 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note 1) Based on dynamic performance test, JIS B 8374-1981.
Series VXF Dimensions VXF216 5 0: Solenoid type Grommet: G Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VXF2280: Solenoid type Grommet: G M Port size Rc Model A B C D E F H J K L N P 3 4 VXF2150 VXF2160 VXF2280 40 48 77 25 33.5 48.5 66 74 110 36 45 63 35.5 40 57
Hs B 30 (33) 36 Auto switch Numbers in ( ) are for type D-F5LF. Approx. Hs D-A44 D-A5/A6 D-A59W 33 Auto switch A Auto switch A B 34.5 Approx. Ht Approx. Ht 56 36 Approx. Hs B Approx.
Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5
P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.
Magnet: D (Built-in), Mounting: F (Flange), Bore Size: Ø16 (5/8"), Stroke: 300 (3"), Port Location: Perpendicular, Auto Switch: B (Band Mounting)
Magnet: D (Built-in), Mounting: F (Flange), Bore Size: Ø16 (5/8"), Stroke: 100 (1"), Port Location: Perpendicular, Auto Switch: B (Band Mounting)
Magnet: D (Built-in), Mounting: F (Flange), Bore Size: Ø16 (5/8"), Stroke: 400 (4"), Port Location: Perpendicular, Auto Switch: B (Band Mounting)
Magnet: D (Built-in), Mounting: F (Flange), Bore: Ø16 (5/8 Inch), Stroke: 400 (4 Inch), Action: S (Spring Return), Port Location: R (In-line), Auto Switch: B (Band Mounting)
Magnet: D (Built-in), Mounting: F (Flange), Bore: Ø16 (5/8 Inch), Stroke: 050 (1/2 Inch), Action: T (Spring Extend), Port Location: Perpendicular, Auto Switch: B (Band Mounting)
Magnet: D (Built-in), Mounting: F (Flange), Bore Size: Ø16 (5/8"), Stroke: 500 (5"), Port Location: Perpendicular, Auto Switch: B (Band Mounting)
Magnet: D (Built-in), Mounting: F (Flange), Bore Size: Ø16 (5/8"), Stroke: 200 (2"), Port Location: Perpendicular, Auto Switch: B (Band Mounting)