3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

C B A stroke A C 3) 2nd stage: B-A stroke operation Following the 1st stage, when the air pressure is supplied from the C port, the rod operates the B-A stroke. B B-A stroke B A C 4) Cylinder retraction When the air pressure is supplied from the B port, the rod retracts completely. B stroke A stroke A stroke or B stroke operation can be made individually.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12

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/>B ' C . 0 E . F.

CE

phase J A B C D A COM COM COM B 12 VDC GND F.G.

Cylinder with Lock

D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10

CE

phase J B C D A A COM COM COM B 12 VDC GND F.G.

Mechanical Valves Series NVM, NVFM, NVZNI

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

IIIIIII

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Auto Switches/Proper Mounting Position at Stroke End Detection D-M9 D-M9W D-A9 Hs Hs Auto switch Auto switch 16.5 16.5 A 22 B A 24.5 B A and B are the dimensions from the end of the head cover/ rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/ rod cover to the end of the auto switch.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Stroke Reading Cylinder and Counter

phase J B C D A t A COM COM COM B 12 VDC GND F.G.

Environment

C A B C A B C A B C A B C A B C LEY40 1100 Work load [kg] 1 1.5 3 2.5 5 10 4.5 9 18 7 14 28 1 1.5 3 1.2 2.5 5 Lead 4: LEY40C 800 900 1000 Pushing force 85% 65% 85% 65% 95% 95% Lead 8: LEY40B Lead 16: LEY40A 10 20 30 40 50 60 70 80 90 0 100 200 300 400 500 600 700 Force [N] Non-rotating Accuracy of Rod Size Non-rotating accuracy q 16 1.1 25 0.8 32 0.7 40 + Max. 65% Set value of pushing force

Modular Type Lubricators Series AL

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50

5 Port Air Operated Valve SYA3000/5000/7000 Series

(For details, refer to Best Pneumatics No. 1-1.) 1459 SYA3000/5000/7000 Series Flow Rate Characteristics/Weight Model/SYA320 Series (Body ported) Valve model Type of actuation Pilot port size Port size Flow rate characteristics Weight (g) C[dm3/(sbar)] b Cv C[dm3/(sbar)] b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position 0.61 0.16 0.64 0.45 0.18 0.44

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

B 97 98 GC 17 20 Y X 11 11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

NCA1

Female Rod End B .

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23