Micro Mechanical Valve Series VM1000

EXH.2 93.7 (112.2) VHK CYL.2 CYL.1 12 18.5 18.5 VH 23 19 21 20 VHS 3 x 1 4 (SUP CYL port) 35 30.5 2 x 4.2 mounting hole 26.4 0.5 MPa supply VHS 2 x 1 8 (EXH port) T.T. 26 N F.O.F.

MHF2

MHF2-8D2 MHF2-8D1 MHF2-8D 2 pieces/unit MHF2-8D Seal kit 12, 20, 21 MHF-B08 MHF8-PS-2 MHF8-PS MHF8-PS 2 pieces/unit MHF2-8D1 Finger assembly 3, 4, 5, 6, 15, 17, 19 Mounting screw MHF-A0802-2 MHF-A0802-1 MHF-A0802 4 pieces/unit MHF2-8D2 The bolts for body through hole mounting are attached to the product.

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

VQC

3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 6 7 8 9 10 Conforming to IP67 for protection from dust and moisture (For kits S, T, L and M) 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

Integrated Controller

Size Order no. 27 16 LE-D-2-7 25 LE-D-19-3 32 LE-D-19-4 Replacement Parts/Grease Pack Applied portion Order no.

AC Servo Motor Driver (Pulse input type)

L A B C Series Equivalent Lead (Including pulley 5(2.86) 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Compact Cylinder with Lock Series CLQ

YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.

HRX-OM-T004

Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

Ionizer

With 2 pcs.

VCS

Note 1) The same bracket is used for VCS3 and VCS4 (port size 1/2). 17-2-44 7 Series VCS Direct Operated 2 Port Solenoid Valve For Steam Dimensions Grommet:G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 A B H 2-P 2-M Thread depth N 2-M Thread depth N VX Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

7

5 C 6 D ( ): Denotes the Normally Open (N.O.) dimensions. 144 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water Dimensions/VXD2 /2 Body Material: C37, Stainless Steel 5 C 6 D Conduit terminal (U2) (V2) E 34 C VX2 32 25 T VXK VXD VXD G1/2 M A VXZ OUT IN VXS B VXB L K F I 2 x P Port size VXE (D) J VXP E U 280 C Conduit VXR 23 T VXH G1/2 VXF A B VX3 IN OUT M VXA 2 x P Port size

CRQ2

to 2 0.5 to 1.5 0.5 to 1.5 1 to 2 1 to 2 1 to 2 11-8-19 20 Series CRQ2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC7 to -XC22/XC30 Please consult with SMC for further information on specifications, dimensions and delivery.

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

XL

XL -50 XL -63 XL -80 (a) 1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

IDU/IDF

Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Title not found

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12