 
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: H (High-noise Reduction Silencer Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: A (Supply Valve: N.C.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: H (High-noise Reduction Silencer Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: A (Supply Valve: N.C.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: H (High-noise Reduction Silencer Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: E (Supply Valve: N.O.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: H (High-noise Reduction Silencer Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: E (Supply Valve: N.O.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: H (High-noise Reduction Silencer Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: E (Supply Valve: N.O.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: P (Port Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: E (Supply Valve: N.O.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: P (Port Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: A (Supply Valve: N.C.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: P (Port Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: E (Supply Valve: N.O.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar
), Pressure Sensor: T2 (-100 to 200 KPa), Option: Y (Vacuum "V" port Release to Atmosphere Type, Check Valve: 1 pc)
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: P (Port Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: E (Supply Valve: N.O.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: P (Port Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: A (Supply Valve: N.C.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar
Nominal Nozzle Size: 07 (ø0.7), Vacuum Port, Supply Port: C8 (Metric; Vacuum Port: ø8; Supply Port: Plug), Exhaust: P (Port Exhaust), Exhaust Sealing Valve: V (Exhaust Sealing Valve), Combination of Supply and Release Valve: A (Supply Valve: N.C.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar
), Pressure Sensor: T2 (-100 to 200 KPa), Option: Y (Vacuum "V" port Release to Atmosphere Type, Check Valve: 1 pc)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
A B A B A B A A A (5.5) 40.5 66 93.5 = 2 40.7 (35) 35 52 61.5 63.5 4-M4 mounting hole Stations D Side U Side 1 2 3 4 5 6 7 8 n 2-C8 R(EXH) port DIN rail clamping screw SMC SMC SMC SMC SMC SMC SMC R R X B B B B B B B B X 9.3 25 P P A A A A A A A A (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 2-C8 P(SUP) port Broken
(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10