Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 841 1402 1962 63 OUT 935 1559 2182 IN 1361 2268 3175 80 OUT 1508 2513 3519 IN 2144 3574 5003 100 OUT 2356 3927 5498 Intermediate Strokes Installation of spacer on standard stroke body. Method Model no. Refer to page 4 for standard model no.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

Smooth Cylinder Series CQSY

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 236 165 118 71 20 10 OUT 314 220 157 94 IN 378 264 189 113 25 12 OUT 491 344 245 147 Intermediate Strokes Method Model no. Installation of spacer on standard stroke body. Refer to page 1 for standard model no. Intermediate strokes at 1 mm intervals are available by using spacers with standard stroke cylinders.

Mechanically Jointed Rodless Cylinder/Linear Guide Type Series MY1H-Z

Grease pack part no.: GR-S-010 (10 g) 96

Stopper Cylinder

Grease pack part number: GR-S-010 (10 g) -X 565 A RSQ Series These 6 figures show the piston rod extended. The dimensions of the double acting type with spring loaded, and single acting/ spring extend type are the same as those of the double acting type.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) D-X Technical Data 1213 A MY1H Series Construction End lock !9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: Calibration Certificate, Made

100

M 0.35 MPa H 0.50 MPa Nil Silencer exhaust 6 600 L/min (ANR)*1 Symbol Vacuum (2/V) port Supply (1/P) port 06 Rc3/4 P Port exhaust (Rc1, G1, NPT1)*3 *1 Branch, Port exhaust 8 (Metric) 04 2 x Rc1/2 (Branch specification) F06 G3/4*2 *3 The same thread type selected for e is used for the port. t Supply valve/Release valve combination u Electrical entry F04 2 x G1/2*2 (Branch specification) N06

Pneumatic Purification

(N10), 3/4 NPT (N06) Model NAD402-N04 (N04 = 1/2 NPT) Minimum operating pressure 22psi. Maximum operating pressure 145psi.

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Part Number Description: BRACKET FOR NID601-N06   Product Line: O   Product Line Description: OTHERS   Family Code: 923   Family Description: ID DESICCANT DRYER   Class Code: G1   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number, BRACKET FOR NID601-N06, OTHERS, ID DESICCANT DRYER, G1, ID 3/4 INCH PART, .77000 lb

Process Pump

A 118 PAF3413S-1S13 PAF3413S-1S19 4 5 10 x 8, 12 x 10, 3/8" x 1/4", 1/2" x 3/8" 115 12 x 10, 19 x 16, 1/2" x 3/8", 3/4" x 5/8" With nut (with LQ3 fittings): PAF3413S-3S13 11 (40) 121 59 (Option) Foot 612 Process Pump Automatically Operated Type/Air Operated Type PAF Series Dimensions: Automatically Operated Type (PAF5000 Series) Female thread: PAF541006 N06 F06 204 10 PA PA(P) 255 120 PAX

Size, Body, Valve Type: 10K (Size: 1; Body Mat'l: Resin; Port Size ø6 One-touch Fitting; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2T (12VDC; Conduit Terminal w/Surge Voltage Suppressor & Light), Other Options: C (Low Concentration Ozone Resistant, FKM Seal, Rc Thread)

7

VX3 Conduit (With surge voltage suppressor) VXA Flat terminal 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q 2R 2S 2W 2T 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Made to Order Produced upon receipt of order. Please contact SMC for lead times.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Description Material Synthetic resin Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel Note Note Hard anodized Hard chrome plated Hard chrome plated No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Table of Contents

0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Description Material Synthetic resin Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel Note Note Hard anodized Hard chrome plated Hard chrome plated No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 20 (2~16L/min), Return Unit: None, Thread: Rc, Port Size: 04 (1/2), Flow Switch Output: 2T (Remote Sensor Unit; Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None, Temp. Analog 4 to 20 mA; Temperature Sensor: Yes)

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 40 (5~40L/min), Return Unit: None, Thread: N (NPT), Port Size: 06 (3/4), Flow Switch Output: 2T (Remote Sensor Unit; Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None, Temp.