DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.
/8 (Rc, NPT, NPTF) 1/8 (Rc, NPT, NPTF) Hexagon width across flats 14 Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 9 9 35 35 10 9 M18 x 1.5 9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions
[V]-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
VA BN S + Stroke ZZ + Stroke C B FX FZ N N FT H With rod boot 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BF BN BP BQ C CL D E EA F FA FD FT FX FY FZ G GA 125 140 160 50 47 145 145 205 1/2 3/8 115 120 36 90 63 35 14 19 14 190 100 230 16 155 to 1000 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 16 180 to 1000 56 53 182 180 290 1/2 3/8
Overhang H mm Overhang H mm 40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa 30 30 0.4MPa 0.3MPa Internal gripping
ON E6,E7 2 ON 1 1 2 16 3. (1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.
15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25
12.5 A 30.5 60 50 32.5 A Cross section AA Z 5-M6 x 1 thread depth 12 4 x H G depth 5.5 6H9 +0.030 H 7 Bottom through-hole 5.1 0 F E 6H9 +0.030 depth 5.5 0 (mm) Z H G F E Model MXW20-100 337 48 75 168 87 MXW20-125 362 52 79.5 185 91 Note) Adjuster bolt (Y) shown in the section above is attached only on type B (with shock absorber). 8-7-16 17 Long Stroke Slide Table Series MXW Dimensions:
C type snap ring for hole Bracket 16 Series MGG Dimensions Basic type/MGGB 20 to 50 4-F through, counter bore G Bottom 4-H Bracket (See table below.)
JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9
-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25
L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.
Description (SF1 kit) (SH1 kit) (SJ1 kit) (SJ2 kit) (SQ kit) (SR1 kit) (SR2 kit) (SV kit) (SZB kit) (SZBN kit) P kit J kit F kit G kit EX120-SUW1(-XP) Note 1) [EX123D-SUW1] Note 2) NKE Corp.: Fieldbus System (16 outputs) NKE Corp.: Fieldbus H System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System
Description (SF1 kit) (SH1 kit) (SJ1 kit) (SJ2 kit) (SQ kit) (SR1 kit) (SR2 kit) (SV kit) (SZB kit) (SZBN kit) P kit J kit F kit G kit EX120-SUW1(-XP) Note 1) [EX123D-SUW1] Note 2) NKE Corp.: Fieldbus System (16 outputs) NKE Corp.: Fieldbus H System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK System
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Applicable tube O.D.: 8 5/16 inch Port size: 1/4, 3/8 (59) IN OUT With float type auto drain H (D) Model Option: P B With drain guide F D J 361 206 293 337 IDG30M, 30HM, 30LM IDG50M, 50HM, 50LM 18 405 171 Drain discharge With float type auto drain With drain guide Drain Drain J H N.O.: Black N.C.: Gray ( ) Maintenance space 100mm or more Thread size: 1/4 (without valve mechanism) Width across
Body Ported Dimensions: Series SY9000 [ ] : AC 2 position double Grommet (G), (H): SYJ9220C8, N9 C10, N11 C12 G H G H 02 03 SY9220G: Approx. 300 H: Approx. 600 147.8 [152.2] [4(A), 2(B) port)] 3/8, 1/4 (Lead wire length) 103.4 Manual override 6.5 4A 2B 18.4 One-touch fitting [4 (A), 2 (B) port] 33.6 (For manifold mounting) 33.2 Applicable tubing O.D.: 8, 5/16" : 10, 3/8" : 12 64.2 61 (5.5
16 CC-Link 001dh 1 1,2,4 * 30 - (9000)h 2 0.01mm (9002)h 1 1mm/s (9003)h 1 1% (9004)h 2 0.01mm (9006)h No. 1 (9008)h 2()/1() 1 (9009)h 4()/3() 1 JOG (0030)h JOG 1 *1 1mm/s 2 (0031)h JOG 1 1 1mm/s 2 (0032)h JOG 1 1 1mm/s (0033)h JOG 1 *1 1% (0034)h 2 (-) 0.01mm (+) (0400)h (040F)h (No.0) 16 (0410)h (041F)h (No.1) 16 (0420)h (042F)h (No.2) 16 . . . . . . . . . . . . .