Air Slide Table Series MXQ F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf
29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22
29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22
Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)
MPa ZSE30A-50.5 kPa ZSE30AF50.0 kPa ISE30A0.050 MPa ZSE30A5.1 kPa ZSE30AF5.0 kPa ON OFF -24No.PS-OML0002CN-G [F 2] OUT2 30 [F 1]OUT1 OUT1 [F 3] 30 2.5 ms [F 4] 31 1000 [F 5] 32 [F 6] 34 0 [F 7] 35 OFF [F 8] 36 OFF [F90] 37 OFF [F97] 39 OFF [F98] 41 [F99] 43 OFF -25No.PS-OML0002CN-G [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE30AF ZSE30A ISE30A MPa 0.001 0.001 0.001 kPa 0.1
29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 32 131 110 (mm) Bore size (mm) Trunnion bracket CD (shaft) 8 Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 32 10 141 7 11 4
Valve For VCW20 OR-1860-120Nil: NBR F: FKM E: EPDM P: PTFE OR-2380-130For VCW30 Nil: NBR F: FKM E: EPDM P: PTFE OR-2600-180For VCW40 e Nil: NBR F: FKM E: EPDM P: PTFE Manifold For VCW20 r OR-1400-178Nil: NBR F: FKM E: EPDM P: PTFE OR-2670-178When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.
II NN I Rod end without '~uto switch illG i ;:xI I ~ 2.FC thread Bore size S z I With 'al:lw switch I wi (mm) 30 51 I 5st 2051 1551 I 20st ~ ~ H 5" 10" 10 st 1 15 51 i 30" P I 6 30.5 35.5 40.5 45.5 3 47.5 52.5 57.5 62.5 18.5 20 , 22. 10 30.5 35.5 40.5 1 45.5 65.5 55.5 1 3 i 50.5 55.5 1 60.5 ;:5:5 1 21 f 30.5 15 35.5 40.5 145.5 26.5 55.5 1 4 54.5 59.5 I 64.5 69.5 79.5 1 23 ~F .Ot ~ .
LQ LVN TI/ TIL PA (mm) Dimensions PAX A B C D E F G H J K L M M5 x 0.8 R N Q Model LVC2 LVC3 LVC4 LVC5 LVC6 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 PB 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55 18 8 42 57 5.5 48 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions
Action D Double acting Mounting Cylinder stroke Through hole & Double end tapped (Standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) Bore size (mm) Standard stroke (mm) 10 10, 20, 30, 40 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 Note) Available only for MQQL. 25 10, 20, 30, 40, 50, 75, 100 Mounting brackets are included when shipped, but unassembled
External gripping Internal gripping L L F F MHF2-8D MHF2-12D 70 Pressure 0.7MPa 30 60 Pressure 0.7MPa 0.6MPa 0.6MPa 50 Gripping force N Gripping force N 0.5MPa 20 0.5MPa 40 0.4MPa 0.4MPa 30 0.3MPa 0.3MPa 10 20 0.2MPa 0.2MPa 10 40 20 40 30 20 10 0 0 80 60 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 150 Gripping
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
J r + ' + t i t t t t t l t | l , b o r j | | | , ' l l l " ' r e , l l l t t l Sealtype . | | E ' r l Valve s-port Body Ported liT T.T""n l l l l E f f i . I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.
Example) RQA 20-30 does not exist.
10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.
10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke
to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.