Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

V

/60 Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without Lead Wire LO L Type Plug without Connector M M Type Plug with Lead Wire MN M Type Plug without Lead Wire MO M

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

Series VQ Base Mounted Metal Seal/Rubber Seal

Standard 110V AC (50/60Hz) VQ4 220V AC (50/60Hz) 24V DC 12V DC (1.5W) High pressure H VQZ Low wattage (0.5W) Y Note) The C kit is applicable to 200/220V AC. Contact SMC for other kits. VQD Note 1) Refer to p1.10-168 for AC.

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

VFR

100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR6000 Cylinder Speed Chart Use as a guide for selection.

Table of Contents

63 80 100 Cylinder bore size (mm) ASN Cylinder speed: 200 mm/sec Cylinder stroke: 200 mm AQ The set pressure can be either fixed or variable.

Table of Contents

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

LEF-OM002xx

200 mm/s mm/s 100 500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.

Aluminum High Vacuum Angle Valve

plug connector M type plug connector 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz XLA U 5 24 VDC 6 12 VDC S type: Not available for AC.

Thermo-con/Rack Mount Type

With feet and no rack mounting brackets With flow switch High-pressure pump mounted HECR 008-A 800 W 1.4 kW Tap water 0.01 to 0.03C Ethylene glycol 20% 010-A 1 kW 2 kW Single-phase 200 to 240 VAC (50/60 Hz) (UL Standards) Water-cooled Single-phase 100 to 240 VAC (50/60 Hz) New New HECR 008-W 800 W 1.4 kW Peltiertype watercooled 012-W 1.2 kW 2 kW Single-phase 200 to 240 VAC (50/

MVGQ

light: 2.1) [24 VDC: 75 (With light: 87.5)] MI W S DC 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz [ ] 4.5 to 50 Hz, 4.2/60 Hz AC Start-up Apparent power (VA) [Current: mA] CEP1 Symbol Specifications (2) 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz [ ] 3.5/50 Hz, 3/60 Hz Tapped hole, drilled hole, pinned hole machined additionally Holding Surge voltage suppressor

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.