Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90.

PA3000/5000/PAX1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump Air

Series VQ Metal Seal/Rubber Seal Body Ported

See p.1.10-90 for details.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

XM, XY

80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Conduit terminal: VT317-T DIN terminal: VT317-D 2 x M6 mounting hole For top mounting (M4) Coil fitting position 4 positions per 90 Coil fitting position 4 positions per 90 Manual override (Non-locking) 2 x M6 mounting hole For top mounting (M4) Manual override (Non-locking) DIN terminal facing upward (101.6) VV061 VV100 V100 Max. 10 3 x 1/4 (Coil positioning pin) (Coil positioning pin) S070

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (pilot air supply port) 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN 1/2, 3/4 1/4 5 Series PA3000/5000 Process Pump

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump

HRX-OM-Q026

100 110 120 Circulating fluid flow [L/min] Fig. 8-16: Pump capacity (HRSH100-A-20/40-, HRSH100-W-20/40-) 8.5.2 HRSH150/200-A-20/40HRSH150/200/250-W-20/400.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-17:

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

100 100 100 239 247 296 320 339 345 44 46 48 51 59 63 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 Dimensions: Auto Feed Tank Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b M Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

MHF2

force N Gripping force N 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 2 Series MHF2 Model Selection Effective gripping force: Series MHF2 Step 2 External gripping Internal gripping The air gripper should be operated so that the amount of overhang "H" will stay within the range

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

CJ2

63 67 60 Stroke 60 Stroke Weight Weight 155 154 75 Stroke 75 Stroke CJ1 198 192 100 Stroke 100 Stroke CJP 234 226 125 Stroke 125 Stroke 260 250 150 Stroke 150 Stroke CJ2 This weight includes weight of rod end nut.

Compact

400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]

JXCx-OMT0028CN

500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.