Compact Cylinder with Air Cushion and Lock Series RLQ Lead-wire length (m) 0.5 (Nil) Rail mounting 32 to 63 Direct mount 32 to 63 Load voltage Indicator Electrical entry direction Wiring (output) Pre-wired connector 3 (L) 5 (Z) Applicable load None (N) Type Special function DC AC Perpendicular In-line Perpendicular In-line 3-wire (NPN equiv.) 5 V IC circuit A96 A96V A76H Reed switch Grommet 200 V A93 F9N F9P F9B F9NW F9PW F9BW F9BA A93V
1/2 W SI CC-Link SI 17 ON CC-Link Ver.1.00 130 -12No.EX-OMP0004CN-I PWR INM12 5 B codeSPEEDCON 1 SV24 V +24V 2 SV0 V 0 V 3 SI24 V +24 V 4 SI0 V 0 V 5 M12 SPEEDCON SPEEDCON SPEEDCON 1/2 SPEEDCON M12 -13No.EX-OMP0004CN-I SV SI DC24 V /28 SV DC24V SI DC24V A.
Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 63, Stroke(mm): 200, Max.
Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 63, Stroke(mm): 200, Max.
.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36 {60) 2.75 (70.5) 3.19 (81) (91.5) 4.O2 (lm) 4.8 (112.5) 4.U (1Al 5.26 (133.5) 5,67 (144) 6.08 o54.5) b.5u (r6s)6.91 (175.5) 7.& (n6) 7.74 (196.5) (207) t47.s) (E t \ " 1 1 $ r
.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36 {60) 2.75 (70.5) 3.19 (81) (91.5) 4.O2 (lm) 4.8 (112.5) 4.U (1Al 5.26 (133.5) 5,67 (144) 6.08 o54.5) b.5u (r6s)6.91 (175.5) 7.& (n6) 7.74 (196.5) (207) t47.s) (E t \ " 1 1 $ r
50 0 to 100 X X X X Conductive NBR 50 10 to 200 X X X X X Conductive silicon rubber The above table covers only general characteristics of subject rubber materials.
Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.
Mist Spray Unit LMU100/200 Series AL800 AL900 Standard Specifications Intermittent spray to cutting and press gear chains, etc.
CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.
CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.
124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x 2 M14 x 2 M14 x 2 MGQL (Ball bushing bearing) A, DB, E Dimensions MGQM (Slide bearing) A, DB, E Dimensions Bore size (mm) A E DB Symbol Stroke A DB
Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.
M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63
Current consumption 55 mA or less Protection Polarity protection Power supply voltage for sensor 1 Power supply voltage: 1.5 V Power supply current for sensor 2 Max.110 mA (However, the total power supply current of 4 input is 440 mA or less maximum) The total power supply current when used as an IO-Link device is 200 mA or less maximum Display accuracy (Linearity) 5.0%F.S.
Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02
Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust style Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without
Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).
] 45 [200] 0 0 50 100 150 200 50 100 150 200 Arm length [mm] Arm length [mm] The maximum clamping force when the arm length is 100 mm and the operating pressure is 44 psi [0.3 MPa]: With an arm length of 100 mm and an operating pressure of 44 psi [0.3 MPa], according to the graph, the maximum clamping force is 45 lbf [200 N].