CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

Stroke Reading Cylinder and Counter

, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 1 8 Rc 41 34 5.5 M6 x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60

CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

300 500 700 Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

VQZ1000/2000/3000

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

LEF-OM006xx

0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Modular Type Lubricators Series AL

W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G

Air Cooled Aftercooler Series HAA 1

HAA15/22 Air inlet Air outlet Port size Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

XL-OMY0002

-50 12 10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD-63 AC90240V XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600

CE

, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.

Uniaxial Electric Actuator Series LJ1

a=3000 L1 mm L1 mm L1 mm Vertical Horizontal Lateral Horizontal/Lateral W a=2000 a=2000 a=2000 a 200 200 200 a=1000 a=3000 a=3000 L3 M3 0 5 10 15 0 2 4 6 8 10 0 5 10 20 15 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 a=1000 a=3000 a=1000 400 400 L3 mm L3 mm L3 mm a=2000 a=2000 a=2000 400 a=3000 a=3000 a=1000 a 200 200 200 L1 M1 0 2 4 6 8 10 0 5 10 20 15 0 5 10 15 Work load

2–4

75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x 45 x

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

RHC

C J G5-S 100 CV 250 = 0.7 200 MVGQ 0.5 0.1 0.3 150 CC 100 50 RB 0 1,000 2,000 3,000 J Maximum speed Vmax (mm/s) : Cylinder load ratio Vmax: Maximum speed (Refer to page 10-6-5.) D-X 20Data 10-6-19

Series AP3500

Select compatible materials of contruction of the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 1000 psig (6.9 MPa) 32 to 124F (0 to 51C) (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2x10-11 Pam3/sec 2x10-10 Pam3/sec 1) 4x10-9 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 70 to 110 psig (0.48 to 0.76 MPa) M5

HRX-OM-W038

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

180

30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 700 180 Angular Type Air Gripper MHY2/MHW2 Series MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 200 0.5 0.5 0.5 60 15 0.4 0.3 0.4 150 0.4 40 0.3 10 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40 Gripping

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or