Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

CRB2/CRBU2/CRB1

5 13.5 M8 x 1.25 depth 10 15 0.006 0.017 14.9 0 0.043 28 0 0.052 1/8 39 80 83 82 3 52 14 98 21 45 12 8 R7.5 60 9 14 75 5 17 M8 x 1.25 depth 12 17 0.006 0.017 16.9 0 0.043 30 0 0.052 1/4 48 90 94 95 63 3 15 110 23.5 53.5 13 7.5 R8 70 9 16 88 5 19 M10 x 1.5 depth 13 25 0.007 0.020 24.9 0 0.052 45 0 0.062 1/4 60 103 120 125 4 78 11.5 140 30 65 7.5 19 80 22 11 R11 108 5 28 For single vane:

100

50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate

Series AK1000

psig (0.52 MPa) 25 psig (0.17 MPa) Inlet pressure: 50 psig (0.34 MPa) AK1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

VQC

BF 9 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60 (12) 40.5 2 PWR 25

Series HAW Water Cooled Aftercooler 1

60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Foot bracket VZS 5 1 3 VFS 22.2 Die cast hole For manifold gasket positioning PE port VS VS7 L plug connector (L): VQZ112 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ112 wMwC3, C4, C6, M5 0 1 Cover diameter 1.5 Cross section 0.23mm2 34 <39> 300 (Lead wire length) 76 (Metal seal) <77> 73.5 (Rubber seal) <74.5> 300 82 (Metal seal) <83> 54 <55> (Lead wire length) 80 (Rubber seal) <81> 60

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Hz 5.0 power 50 Hz 3.4 (VA) Holding 60 Hz 2.3 Power consumption (W) 1.8 Surge voltage suppressor and indicator light Available as option Note 1) Pilot pressure range should be 0.1 to 1 MPa (14.5 to 145 psi).

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

5 Port Solenoid Valve, Series VQC

BF 9 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CC

Hz) 200 VAC (50/60 Hz) 24 VDC Other Air operated For the one without combined valve (0), solenoid valve does not come with.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100 mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50

IR1000/2000/3000

) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa)

Compact End Lock Cylinder Series CBQ2

4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M N O P 32 7 34 5.5 9 Rc 1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50 8 50 6.6 11 Rc 1/4 8 71 19 63 8 60 9 14 Rc 1/4 10.5 84 19 Series CBQ2 Dimensions Foot

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only