1 Blow Gun Series VMG K M H D MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Pressure loss is less than 1%. (nozz nozzle 900 400 KNL3-06-200 KNS-R02-110-8 KNL6-06-200 800 350 Flow rate [l/min (ANR)] Flow rate [l/min( ANR)] 700 300 600 250 KNS-R02-090-8 KNL3-06-150 500 KNL6-06-150 200 400 KNS-R02-100-4 150 300 100 KNS-R02-075-4 200 50 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] 15-7-5 6 Series VMG Dimensions VMG11/Piping
isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!
, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.
, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 Minimum Strokes for Auto Switch Mounting Unit: mm (in) D-Z7, Z8 D-Y5, Y6, Y7 D-Y7W, D-Y7BAL 180, 200 2 pcs.
70 100 200 300 10 30 50 70 100 200 300 Eccentric distance l (mm) Eccentric distance l (mm) Selection graph to 700mm/s Selection Example: Vertical Upward Mounting Solid line: Operating pressure 0.4MPa or more 100 50 Selection conditions Mounting: Vertical upward (lifter) Maximum speed: 500mm/s Load mass: 40kg Eccentric distance: 80mm Load mass m (kg) Refer to graph based on vertical mounting
(mm) =~ J Standard Stroke Refer to page 19 on "Minimum Allowable Stroke When Mounting Auto Switches ~. 32 ' 25,50. 75,100, 125,150, 175, 200, 250,300, 350,400, 450,500 700 ~; 40 25, 50, 75, 100, 125, 150, 175. 200, 250, 300, 350, 400, 450, 500 800 SO 1200 25, 50, 75,100, 125, 150, 175, 200, 250, 300, 350, 400,450. 500, 600 63 25. 50,75,100. 125,150, 175,200, 250. 300, 350,400, 450,500, 600
QW RW T W X Y Z Bore size (mm) S 140 32 60 33 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 Long Stroke X Y Z Bore size (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 40 125, 150, 175, 200, 250, 300 55 14 14 8-27-9 10 Series CXT Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed switch Solid state switch A B W D-A9 D-M9 D-F9BAL
MGP(kg) MGPM12100 (mm) (mm) 10 20 25 30 40 50 75 100 125 150 175 200 250 300 350 400 12 MGPM12 0.24 0.28 0.31 0.35 0.39 0.50 0.59 0.70 0.79 0.89 0.98 1.17 16 MGPM16 0.33 0.38 0.43 0.48 0.53 0.68 0.80 0.97 1.09 1.22 1.35 1.60 20 MGPM20 0.67 0.75 0.83 0.91 1.17 1.37 1.57 1.76 1.96 2.16 2.63 3.03 3.42 3.82 25 MGPM25 0.95 1.05 1.16 1.27 1.65 1.92 2.19 2.47 2.74 3.01 3.67 4.21 4.76 5.30 32 MGPM32
5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load
5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load
Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100
Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge
Recommended shim thickness) Arm length L: 6 in 0.04 0.02 0.06 500 Clamping force (lbf) 400 0.7 MPa 300 0.5 MPa 0.3 MPa 200 100 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 186 Model Selection 2 Slim-line power clamp cylinder mounting 63 Arm length L: 200 mm 4000 Clamping force (N) 3000 CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA 2000 1000 0 0 1 2 3 4 5 6 7 8 9 Shim
Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.
Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.
Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.
D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).
D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).