Multistage Ejector Series ZL112/212 1

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

3-Position Rotary Table

(CCW: Counterclockwise, C: Center, CW: Clockwise) C C C C CW CCW CW CCW CW CCW CW CCW Left 90: Right 90 Left 45: Right 45 Left 90: Right 30 Left 60: Right 90 Working Principle This model uses a 3-position 5-port solenoid valve (pressure center).

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Refrigerated Air Dryer

AMD AMH Data A: Inlet Air Temperature Data B: Ambient Temperature Data C: Inlet Air Pressure AME Inlet air temperature Ambient temperature Inlet air pressure MPa psi Correction factor F C Correction factor AMF Correction factor IDFB3E to 37E IDFB55E, 75E 1.31 F C 77 90 95 100 104 25 32 35 37.8 40 75 100 110 120 125 150 175 200 232 0.53 0.70 0.76 0.83 0.86 1.03 1.21 1.38 1.60 1.24 0.95 ZFC

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

CG1

are not attached for bore size 80 and 100.

MGQ

39 12 16 20 25 32 40 50 63 80 100 40 42 52 62 80 90 100 110 140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Series AK1000

0.69 90 0.62 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 60 0.41 50 0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Multistage Ejector (N)ZL Series

] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate [l/min(ANR)] Suction Flow rate [l/min (ANR)] Time to reach vacuum Time to reach vacuum Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure

3

resolution 35 90 20 mm shorter 160 CAT.ES100-115A Series PFMC 3-Color Display Digital Flow Switch Series PFMC Clockwise 225 Counterclockwise 90 Rotary display Rotary display Functions Functions (sRefer to pages 10 and 11 for details.)

VS 8-2/VS 8-4

How to Order Applicable solenoid valve model Interface regulator model Regulating port VVS8040-ARB-A-1 VVS8040-ARB-B-1 VVS8040-ARB-P-1 VVS8040-ARB-AB-1 A VSS R8-4 (Size 26 mm) B P A, B Unit: mm 50 54.5 148 SMC SMC 2 3/5 14 4 1 109.5 90 90 27 VVS8040-ARB-AB-1 VVS8040-ARB-1 A B P Regulating port: A Regulating port: A, B Regulating port: B Regulating port: P 25 Series VS 8-2/VS 8-4 S R S R Conforms

Compact and Lightweight

100 100 100 100 100 Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 80 80 80 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Air consumption 60 60 60 60 60 60 Suction flow rate Air consumption 40 40 40 40 40 40 Suction flow rate 20 20

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Basic Type/Direct Mount Type

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 CY3B CY3R CY3B CY3R CY1S 63 63 1200 40 40 1100 3000 100 90 80 70 60 50 40 30 20 10 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) H CY1L Bore size 10 Bore size 2500 1000 900 800 700 10 50 50 H 32 32 2000 CY1H 1500 600 25 25 500 400 300 200 100 CY1F 1000

4-channel Flow Monitor ( compatible)

7 to 110 100 L Flow gal/min 2.6 to 26.4 1.8 to 29.0 PD 100 to 1000 70 to 1100 Flow L/min 50 to 250 20 to 280 250 L Flow cfm 13 to 66 5 to 74 PD 200 to 1000 80 to 1120 Temperature oC 0 to 100 -10 to 110 50 oC Temperature oF 32 to 212 14 to 230 PD 0 to 1000 -100 to 1100 Flow L/min 0.0 to 10.0 0.0 to 10.5 10 L Flow gal/min 0.000 to 0.353 0.000 to 0.370 PD 0 to 1000 0 to 1050 Flow L/min 0.0

HRL

100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet