Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

AC Servo Motor Driver (CC-Link Type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

3 Port Solenoid Valve Metal Seal Series VZ200 1

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

Rotary Actuator/Vane Type

Current: 4 directions 8 directions Starting point Rotation range CRB2 CRB2 Starting point Rotation range Port surface Starting point CRB1 Port surface Rotation range MSU CRJ 30 30 Port surface CRA1 Port surface Port surface 60 60 Rotation range Starting point CRQ2 MSQ Starting point MSZ Starting point (Single flat) 60 60 CRQ2X MSQX Port surface Rotation range MRQ 30 30 Port surface Rotation

CG5-S

, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

15

1 y, z + A = 200 y, z + A = 300 1 y, z + A = 200 0.1 y, z + A = 300 0.01 0.1 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the

SZ3000

Switch (When equipped with switch) L n 4 5 6 7 8 9 3 2 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 4 5 6 7 8 9 3 2 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 148 137.5 124 12 160.5 150 134.5 13 173 162.5 145 14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 160.5 150 134.5 13 173 162.5 145

CXS

22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 8-28-26 26 Series CXSJ Dual Rod

CXS

22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 8-28-26 26 Series CXSJ Dual Rod

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 2) The flange can be mounted on the rotary actuator at 60-degree intervals.

Micro Mechanical Valve Series VM1000

Side mounting Panel mounting VM100/Bottom ported only 3 (R) (3 port) Pneumatic indicator 2 (A) 1 (P) Series VM100/200 CAT.ES12-8A a Series VM100/200 Actuator Variations * It is possible to change the actuator assembly and mount to basic type.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

17

Maximum Allowable Moment MY1B/M1 MY1B/M2 MY1B/M3 200 300 400 500 40 50 100 30 200 20 50 40 30 100 10 20 40 50 3 4 5 30 10 20 Moment Nm Moment Nm Moment Nm 2 5 4 3 10 1 MY1B40 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B40 MY1B40 0.3 0.4 0.5 MY1B32 1 2 MY1B32 MY1B32 MY1B25 0.2 1 0.5 0.4 0.3 MY1B25 MY1B25 0.1 0.4 0.5 0.2 0.3 0.05 0.04 0.03 0.2 0.1 0.02 0.06 0.1 100 200 300 400 500 1000 1500 100 200 300

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

Soft Start-up Valve

Solenoid Valve for 200/220 VAC Specification Warning AC specification solenoid valves with grommet have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200/220 VAC specification pilot valves, this built-in rectifier generates heat when energized.

LEH_C

200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN1 DC24V 2) USB (A-miniB type ( <> AWG20 (0.5mm 2) (, USB ) LEC-W2 1 2UL ,UL1310 Class2 (3m LEC-T1-3JG* (LEC ) 6.

HRX-OM-M090

Circulating fluid set temperature 20 oC READY band width (upper/lower temperature range) 2 oC READY time 60 sec. Preparation is completed 60 seconds after the circulating fluid temperature reaches 18oC to 22oC.

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S