5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

or less Closed center VQZ2000 Rubber seal 8.1 (0.45) VQZ2321 25 or less 33 or less 88 Metal seal 8.1 (0.45) VQZ2420 23 or less 30 or less Exhaust center 3 position Rubber seal 10.8 (0.6) VQZ2421 25 or less 33 or less Metal seal 6.3 (0.35) VQZ2520 23 or less 30 or less Pressure center Rubber seal 8.1 (0.45) VQZ2521 25 or less 33 or less Metal seal 12.6 (0.7) VQZ3120 17 or less 22 or less

Stability of suction position,

M22 x 1.5 Width across flats 30 D-D D-D M22 x 1.5 Rc1/8 52.5 61.5 A B Rc1/8 22 D D 26 22 32 D D 26 78.6 32 11 61 11 84.5 53.61) 22 75 44.11) 18 4 4 30 (Rotating angle) 30 (Rotating angle) 85 80 57 106 100 71.5 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF80BMJB10 126.5 186.5 497 492 532 ZP3E-YF80BMJB30 151.5 211.5 529 524 564 ZP3E-YF80BMJB50 171.5 231.5 553 548

XLAQ/XLDQ

Caution Bonnet assembly Bonnet Assembly: Component Part No.: q Model Flange (Valve) size Temperature specifications Indicator 16 25 40 50 XLAQ16-30-1 XLAQ25-30-1 XLAQ40-30-1 XLAQ50-30-1 General use XLAQ16A-30-1 XLAQ25A-30-1 XLAQ40A-30-1 XLAQ50A-30-1 XLAQ XLAQ16-30-1H XLAQ25-30-1H XLAQ40-30-1H XLAQ50-30-1H High temperature XLAQ16A-30-1H XLAQ25A-30-1H XLAQ40A-30-1H XLAQ50A-30-1H General

LG1H

of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Slider Type/Ball Bushing Bearing

nut insertion Square nut insertion TW NL (mm) PA 65 66 Model A 125 132.5 CY1HT25 CY1HT32 EB 79 90 H 63 75 HA 46 52.5 HB 46 57.5 HC 61.5 72.5 HG 19.5 25 HP 58.5 69.5 HT 35 43 J M6 x 1.0 M8 x 1.25 LL 56 63.5 LW 119 130 M M6 x 1.0 M8 x 1.25 MM 10 12 N 20.5 23 NL 18 22.5 NT 9 12 EA 28.5 30 Model PB 108 115 CY1HT25 CY1HT32 PS 51 61 S 209 219 TW 110 124 W 136 150 XA 11.3 9.7 XB 9.5 2 Z 250 265

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

SL5200

in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa V3 L 1 H 2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale

Short Stroke Electric Actuator Series LX

) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1

JA/JAH/JB/JS

86.5 30 30 32 36 36 36 41 41 41 46 46 50 55 60 65 75 5.5 7 8 10 13 13 17 17 17 19 19 19 22 24 24 27 12 12 13 14 14 14 16 16 16 18 18 20 21 23 25 29 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust

JA/JAH/JB/JS

86.5 30 30 32 36 36 36 41 41 41 46 46 50 55 60 65 75 12 12 13 14 14 14 16 16 16 18 18 20 21 23 25 29 5.5 7 8 10 13 13 17 17 17 19 19 19 22 24 24 27 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

MU

1.4 0 Stroke length tolerance 378 121 159 197 235 30 46 83 IN 25 12 15 Cushion Rubber bumper 650 218 283 348 413 42 88 153 IN 32 14 24 Thread tolerance JIS Class 2 1056 366 472 578 683 56 155 261 IN 40 16 30 Equivalent tube I.D.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3

NCA1

0.62 1 5 3/4 1.71 3 5/8 2.36 4.75 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4.75 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 .75 0.62 1 5 7/8 1.75 3 3/4 2.48 4.88 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

LEC-OM07605CN

LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr. PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

LG1H

Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

Floating Joint

42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5

Series CQ2

There may be large variations depending on the surrounding environment (variations as much as 30%).

SYJ300/500/700

circuit (24, 12 VDC only) SY100-30-2AFor 200 VAC: T VQZ For other voltages of AC: SY100-30-3APower saving circuit is not available in the case of W type.