Compact Electric Actuator Series LG1

Nonstandard Compatible Motors: Motor model Corresponding driver model Power supply voltage (AC) Motor output (W) MSM011P1A Matsushita Electric Industrial Co., LTD 100/115 MSD011P1E MSM012P1A 100 200/230 MSD013P1E 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A Yaskawa Electric Corporation 100/115 SGDE-01BP 100 SGME-01BF12 200/230 SGDE-01AP SGME-01AF12 Refer to

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20

Ionizer Nozzle type IZN10 Series IZS

mm to 500 mm 0.1 0.2 0.05 0.1 O.D. 6 mm, I.D. 4 mm, Length 100 mm 0 0 50 100 150 200 250 0 0 100 200 300 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Note) When a pressure above each line is used, the maintenance detector may work and turn on the LED.

Bag Filter

FN Number of elements Nominal filtration accuracy Note) Element size Symbol 1 3 5 Number of elements 1 pc included (FGF1) 3 pcs included (FGF3) 5 pcs included (FGF5) EB ES Element material (Polyester) Symbol Nominal filtration accuracy (m) Symbol A B Element size 190 x L440 190 x L770 005 010 025 050 100 5 10 25 50 100 Port size Symbol 20 40 60 Port size Rc2 100(4B)JIS10KFF 150(6B)JIS10KFF

Slider Type/Ball Bushing Bearing

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

Compressed Air Preparation Filter

0 0 300 50 250 200 150 100 300 600 450 300 750 1200 900 600 1500 Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] AM50 AM60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa 4 Pressure drop [kPa] Pressure drop [kPa] Inlet pressure 0.5 MPa Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rubber seal Exhaust center 10-SQ1431 39 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less 100 Rubber seal Pressure center 10-SQ1531 39 or less 0.14 0.20 0.59 0.19 0.21 0.79 25 or less 100 Rubber seal Note 1) Values for the cylinder port size of C6, CYL Values of EXH.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 12 12 12 L = 100mm L = 100mm L = 100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

76

temperature: 113F (45C) RoHS How to Order IDF 30 100 FS Nil C K P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

ISO Standard Hydraulic Cylinder

32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

15

Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

ITV

IR 0.5 0.5 0.6 Set pressure (MPa) Set pressure (MPa) 0.4 Set point VEX 0.5 0.3 0.4 0.0 AMR 0.3 0.2 0.2 0.5 ITV 0.1 0.1 1.0 0.0 0.0 IC 0 50 100 200 150 0 50 100 150 200 250 0.8 0.2 0.4 0.6 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV203 VY1 G Repeatability Linearity Hysteresis 1.0 0.6 1.0 PPA 0.5 Output deviation factor (%F.S.)

SYJ3000/5000/7000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.5 MPa Load rate: 50% Stroke 60 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ7143-02 Cylinder is in extending.

MGC

, 125, 150, 200 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore