SMC Pneumatic Clean Series

R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

RQ

Working principle A + A' A' q When the piston is retracting, exhaust is discharged from both A and A' until piston seal H passes the air passage A. After piston seal H has passed the air passage A, exhaust is discharged only from A'. The section marked with diagonal lines becomes a cushion chamber, and a cushioning effect is achieved.

MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !

VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Plate Cylinder with Lock Series MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING .85800 lb

Please contact us for the latest version.sales@ocaire.com, MFLD,BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING .47300 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in metal base (IP20) , Manifold for EX510 Gateway-type serial transmission system , Side or bottom ported , Side ported available with external pilot , Available with one-touch fittings, MFLD, BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in metal base (IP20) , Manifold for EX510 Gateway-type serial transmission system , Side or bottom ported , Side ported available with external pilot , Available with one-touch fittings, MFLD, BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in metal base (IP20) , Manifold for EX510 Gateway-type serial transmission system , Side or bottom ported , Side ported available with external pilot , Available with one-touch fittings, MFLD, BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING

._3d_items_collection = {}; } SMC SX5000-76-6A-Q blanking plate assy, SS5Y5 MANIFOLD SY5000*** $7.45 Add to Quote Add To Cart Add to Cart SMC SX5000-77-1A blocking plug (sy5000

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING 1.58732 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING 2.57713 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in metal base (IP20) , Manifold for EX510 Gateway-type serial transmission system , Side or bottom ported , Side ported available with external pilot , Available with one-touch fittings, MFLD, BASE MT, SYJ5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SY5000 SERIES, VALVE, SS5Y5 MANIFOLD SY5000, UJ, SS5Y5 BUILT IN FITTING 1.76369 lb