PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

PSxx-OMM0006CN

) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

2

(41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 Flow Control Equipment 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33) AS42l1FG-04-10(S)A 10 1/2 24 (23.8

Table of Contents

O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19

AC

11 19 33 1/4 1/4 Y51-02, 03 Y41-02, 03 AC4000, AC4020, AC4030 14 24 39 3/8 AC4000-06, AC4020-06 AC4030-06 AC5000, AC5500, AC6000 AC5020, AC5520, AC6020 1/4 Y61-03, 04 14 24 41 3/8 3/8 Caution on Assembling 15 30 50.5 1/2 When T type interface with bracket is required, order as example below.

Table of Contents

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

KJ

O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.

A

1/4-28UNF 25 0~0.002 10 -0.4 ~ -0.2 3/8 30 14 18 RCS-025 8 20 41 1/4-28UNF 25 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Modular F.R.L. Unit

) 03 Y510-(02) 03 Y61003 (04) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02

Air Fittings & Tubing

-03 15 35 48 22 41.5 29.5 10 21 24 KQ2E10-02 12.5 34.5 53 21 M20 X 1 22 KQ2E10-03 15 36.5 67 24 58.3 46.1 12 22 27 KQ2E12-03 14 37 92 23 M22 X 1 KQ2E12-04 18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 X 1.5 KQ2E16-04 18 44 132 Note1) ( ): Values for soft nylon.

Modular F.R.L. Unit

VHS3003 VHS2002 VHS30-03 VHS4002 Note 6) 01 02 02 03 06 Piping adapter E100-M5 E200-02 E300-03 E300-03 E400-04 E500-06 E60010 E60006 E60006 10 10 03 04 04 06 Note 6) 02 01 02 02 Pressure switch 03 IS1000E-20 02 IS1000E-30 03 IS1000E-30 03 IS1000E-40 04 with piping adapter 03 04 04 06 Note 6) 01 01 01 02 03 Y14-M5 Cross interface Y24-02 Y34-02 Y34-02 Y44-03 Y54-04 Note 1) in part numbers

Best Pneumatics Vol. 14

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Table of Contents

03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41 8 17.9 43.3 21 67 18.5 57 29.5 3/8" 23 20.9 46.5 35.2 40.2 41.5 19 3/8 AS321F-03-07 AS321F-03-10 27.8 43.3 10 13.2 18.5 39.3 17 55 21 59 31.8 1/4" AS321F-03-09 AS321F-03-12 29.5 15.2 41 18.5 57 44.3 12 20.9 46.5 41.5 40.2 35.2 20.9 22 61 32.8 23 5/16" 3/8 AS321F-03-11

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Fluoropolymer Piping Equipment

8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.

Modular Design with Uniform Body Style

By-pass port L-shaped piping adapter Air filter AF30-03-D 1 pc. Regulator AR30-03E1-D 1 pc. Cross spacer Y34-03-D 1 pc. IN Pressure relief 3-port valve VHS30-03-D 1 pc. Cross spacer By-pass port Combination example r Please contact your local sales representative for ordering procedures. Filter regulator Piping adapter E300-03-D 1 pc.