5 to 40 Circulating fluid flow setting range*4 L/min 10 to 40 10 to 40 Circulating fluid discharge pressure display range MPa 0 to 1.5 0 to 1.5 -30 to 40C: Galden HT135*5 FluorinertTM FC-3283*5 20 to 90C: Galden HT200*5 FluorinertTM FC-40*5 Circulating fluid (No intrusion of foreign body) Refrigerant R404A (HFC) R404A (HFC) Quantity of refrigerant kg 2.9 0.72 (At 20L/min) 0.72 (At 20L/min
Nil, G 1 to 40 DC Note) With no condensation How to Order (Single Unit) 5 01 GY1 VX 2 0 21 Normally Closed (N.C.)
(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .
Maximum vacuum pressure 84 kPa (630 mmHg) The suction volume has been increased by 40% through the adoption of a twostage nozzle construction.
Red Diode Coil Black Light/Surge voltage suppressor Coil 13-2-40 40 Vacuum Module: Vacuum Pump System Series ZX ZX Table (1) Valve Unit/Combination of Supply Valve and Release Valve (Refer to page 13-2-42 for details specifications.) ZR Components Solenoid valve Supply valve Release valve Air operated External release N.C. (VJA314) ZX1A None None Air operated N.C. (ZX1A) N.O.
AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1
Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless
(located on both the right and left side) Before disassembly, be sure to check that no inlet or outlet pressure is applied and exhaust the internal pressure thoroughly before starting the job. 707 Regulator Single Unit Type ARM5S Series How to Order A 07 S ARM5 Single unit type 1.
ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model
A: Orange B: Green (Mounting hole) M5 x 0.8 M5 x 0.8 (External pilot port)
Consumable parts 3-3-1 Replacement parts 20 25 32 40 Seal kit number CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS Grease pack (Accessory) GR-S-010(10g) Rod seal Piston seal Contents of the Tube gasket seal kit Grease pack (10g) 1pc. of each 20 25 32 40 Wear ring CM-020-07-301B CM-025-07-302B CM-032-07-304B C1A040-07-305B Grease pack part number: GR-S-010(10g) GR-S-020 (20g) C a u t i o n
Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis
Note) 1/2 standard Metric size 23 04 06 08 10 12 Inch size Made to Order Refer to page 608 for details. 3.2 01 03 05 07 09 11 13 1/8" With One-touch fittings 4 5/32" Caution 6 3/16" 8 1/4" Be sure to read before handling.
AS32l1F-U02-12A 12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A 16 23.8 34.8
IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20
-08 21 34.1 39.1 8.2 64.4 15.2 8 18 19.8 31 31.5 36.5 8.1 59.8 15.2 18 5/16" AS2051F-09 AS3001F-10 32 35.6 40.6 9.8 71.6 18.5 10 21 42 33.3 38.3 7.4 59 13.2 17 1/4" AS3001F-07 AS3001F-12 33 36.8 41.8 11 76 20.9 12 22 19.8 46 34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9
Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.
Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.
Dimensions 06 07 Energy saving nozzleIZN10E-01 06 07 High flow rate nozzleIZN10E-02 Note M3 x 0.5 depth 4 Ground terminal 2 x M3 x 0.5 depth 10 Note Note) Dimensions of the area ( shaded) on page 5 Mounting 3).
1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0 AXA 0 Byte1 Hi byte DYB(2) 07 (0) Byte2 AXA 1 Lo byte 07 (0) Byte3 Hi byte 815 SEN3(5) Byte4 DXB(3) 07 1623 Byte5 07 2431 DXD(4) Byte6 815 Byte7 Padding 8 byte 6 byte Diagnostic mode 0 (MSB-LSB) 1 Hi byte DYB(1) 07 Byte0 AXA 0 Byte1 Lo byte DYB(2) 07 (0) Byte2 AXA 1 Hi byte 07