Large Type Vacuum Unit Series ZR

vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65 (L) Lead wire length 0.6 (3.0) m PNP output 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output 67

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

KR

(mm) Connection thread R Model L1 L2 D1 Applicable tubing KRW06-02S KRW06-01S 1 8 26 41 67 30 47 74 66 76 145 10 42.5 40 46 48 43.5 49.5 51.5 56.5 58.5 65 57.5 59.5 66 10 20 48 46.5 1 4 17 4.0 14 17 12 14 17 12.8 6 8.6 KRW06-03S 47 14.2 3 8 1 8 KRW08-01S KRW08-02S KRW08-03S KRW10-02S KRW10-03S KRW10-04S KRW12-02S KRW12-03S 1 4 3 8 1 4 3 8 1 2 1 4 3 8 51 52.5 59.5 61 66 62 63.5 15.2 12 23

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L (A) N LQ2H21-M LQ2H22-M LQ2H23-M LQ2H24-M LQ2H31-M LQ2H32-M LQ2H33-M LQ2H34-M LQ2H35-M LQ2H36-M LQ2H41-M LQ2H42-M LQ2H43-M LQ2H44-M LQ2H51-M LQ2H52-M LQ2H53-M LQ2H54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 W 39 1/8" 42.5 19 19.9 16 18 VC 36.5 1/4" (M) H VDW 49 43 (E) H 1/4" Class 2, 3 48.5 42.5 VQ R (NPT) Port size 22 26.2 24 24 49 42.5 3/8" VX2 48.5 59 58 59 58 68 67 68 67 42

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

1.7 4.5 3 4.5 67 1.7 P=11 15.5 Mounting hole for M2.5 5.5 (30) 38 (14) 46.5 8 3.5 32.2 33 Residual pressure release manual override DIN rail clamp screw 11 Residual pressure release manual override 29.5 (17.5) 38 U side D side Stations 1 2 3 n (43) 2.5 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 2n-C3, C4, C6, M5 C3: One-touch fitting

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5

ISO Cylinder

Boss-cut/Basic [mm] Dimensions Bore size AM B C EE G1 G2 H K KK L LD LH LX N1 N2 NA S SW (WH) (XB) ZZ 8 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 10 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 12 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Auto Switch Mounting Height (mm) D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BA D-F5NT Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-M9V D-M9WV D-M9AV D-A5 D-A6 D-A59W D-A9V D-P4DW D-A44 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Bore size 32 40 50 63 80 100 125 24.5 23 35 67 27.5 77 27.5 27.5 24.5 25.5 23 32.5 23

CE

REC CX Simple operation CY High Precision Stroke Reading Cylinder (CEP1) MQQ M Resolution: 0.01 mm (Accuracy 0.02 mm) Special scraper now standard (IP-67) 2 types of seal material available (Made to Order) Power supply voltage 12 to 24 VDC Multi-counter (CEU5) RHC Output terminal: 5 points Number of output settings: 20 points (Bank switching) 31 points (Binary output) Communication

Stroke Reading Cylinder and Counter

High Precision Stroke Reading Cylinder (CEP1) Resolution: 0.01 mm (Accuracy 0.02 mm) Special scraper now standard (IP-67) 2 types of seal material available (Made to Order) Power supply voltage 12 to 24 VDC Auto switch mounting orientation can be freely selected (3 mounting surfaces) Stroke Reading Cylinder (CE1) Resolution: 0.1 mm (Accuracy 0.2 mm) When used in an environment where

Tie-rod Type Hydraulic Cylinder

H B C F A E G J K L D Size Tolerance +0.027 0 +0.027 0 +0.027 0 +0.027 0 +0.033 0 +0.033 0 +0.033 0 40 47 21 45 19 12 9 18 12 32 M8 x 20 60 R15 40 double clevis type 44 L K counter bore depth 2 J counter bore 50 53 23 50 23 12 11 21 14 35 M10 x 22 73 R18 50 double clevis type 53 A B 63 60 27 55 23 15 11 23 16 40 M10 x 25 80 R20 63 double clevis type 60 AC-A1bore size 80 67 31 65 28 16 13

Air Cylinder

80 92 105 130 155 180 147 160 172 185 210 235 260 23.5 10.5 32 12.5 25 37.5 50 75 100 125 67 80 92 105 130 155 180 149 162 174 187 212 237 262 23.5 10.5 40 12.5 25 37.5 50 75 100 125 71.5 84.5 96.5 109.5 134.5 159.5 184.5 181 194 206 219 244 269 294 27 10.5 Symbol Stroke Bore size (mm) Boss-cut Female Rod End (mm) With Air Cushion (mm) Bore size ZZ Without rod boot With rod boot 1 to 50

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

PEND 11-6-1 2 Mini-rotary Actuator Series CRJ Rack & Pinion Style/Size: 05, 1 43 (54) 48 (61) Compact Compact Lightweight Lightweight CRJ05:32 g (39 g) CRJ 1:54 g (67 g) CRJ05: 32 g (39 g) CRJ1: 54 g (67 g) 19.5 23.5 13.5 16.5 Top CRJ05 Bottom CRJ1 Numbers in ( ) are for 180.

CV/MVGQ

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-15-67 68 Series CVS1 Specifications Speed controller installed Operation type can be changed to rod extended when energized or rod retracted when energized. A selection of solenoid valves is possible.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

ST 10 20 30 40 50 9+ST 19 29 39 49 59 10+ST 20 30 40 50 60 37+ST 47 57 67 77 87 47+ST 57 67 77 87 97 CXSJ6-10 21-/2211-/12CXSJ6-20 CXSJ6-30 CXSJ6-40 CXSJ6-50 21-/2211-/1221-/2211-/1221-/2211-/1221-/2211-/1278 Dual rod cylinder/Compact type CXSJ 2122CXSJ/ 1112Dimensions / 10 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter

Bernoulli Gripper

adapter should be provided by the customer. 2 Bernoulli Gripper ZNC Series Series Variations Attachment Pressure sensor With stoppers With vibration suppression cover Material Size Weight [g] Resin Stainless steel 20 12 V 30 27 V 40 48 V V Aluminum 60 110 V 80 193 V 20 7 V NBR (Improved abrasion resistance) 30 17 V With 40 30 V or Resin without Silicone rubber (Heat/ozone resistant) 60 67

MY1

these dimensions.) 7 Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W Stroke Adjusting Unit With adjusting bolt MY1W Bore size Stroke A h E EA EB W Stroke adjusting unit h TT MY1W50, 63 EC EY E 14.6 20 24 29 35 40 52 W 58 58 70 88 104 128 152 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 EA 7 10 12 14 17 20 26 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 EY 39.5 45.5 53.5 67