4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !

-fl Seies

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !

Pressure Gauge Guide

This will cause a malfunction. 14-11-6 6 Pressure Gauge Guide How to Order G M C 46 10 01 X2 Option Specifications Symbol Pressure gauge F.R.L.

HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

LEC-OM02704CN

616-40 6.1 (PA) 62 6.1.1 62 6.1.2 63 6.1.3 63 6.1.4 64 6.1.5 65 6.1.6 65 3 - 6.1.7 66 6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40

•

M5 XO.8 ~ -. ~ w '(;, r i 0] O J L I I ' ~ 1A Weight List (gf) Deep type Bellows type AeifYpe Rat with III ~ ; 4 t4 >'6 >'6 >'6 ffl fa Model ~ ' 4 II$>. t8 .>'6 '4 ,: J:~ , _1 I 29 30 !:,)!

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

3(R) port: Rc 1/8 Option Valve stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Polarity SOL.A 1A ( ) ( + ) SOL.B 1B ( ) ( + ) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A ( ) ( + ) SOL.B 2B ( ) ( + ) 2 stations SOL.A 3A ( ) ( + ) SOL.B 3B ( ) ( + ) 3 stations SOL.A 4A ( ) ( + ) SOL.B 4B ( ) ( + ) 4 stations SOL.A 5A ( ) ( + ) 10A COM SOL.B 5B ( ) ( + ) 5 stations

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Note 3) AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Float type auto drain Y300 IS1000M-30 Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Pressure switch Note 5) Note 4) Note 5) 01 (02) Y310(01) 02 Y510(02) 03 Y310(01) 02 Y410(02) 03 T-interface Y210Note 5) 02 03

2/3 Port Valve

VX22 0 5 6 VX23 0 5 6 VX070-029 4.1-3 VX21/22/23 Energized Closed (N.O.)

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

70pvpump

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.

5 Port Air Operated Valve

12 19 18 17 16 15 14 13 2 3 n L 10 9 8 7 6 5 4 L1 L2 569.5 74.5 102 129.5 157 184.5 212 239.5 267 294.5 322 349.5 377 404.5 432 459.5 487 514.5 542 64.5 92 119.5 147 174.5 202 229.5 257 284.5 312 339.5 367 394.5 422 449.5 477 504.5 532 559.5 1515 VFA1000/3000/5000 Series Dimensions: VFA3000 Series Type 30: VV5FA3-30-1-: Common exhaust 6 L2 L1 17.5 1/8, 1/4 [4 (A), 2 (B) port] 1 11.5 49 R

ZX

VJ10-20-4A-6 2 pcs. 5A 10 ZS ZP (For DC) 4A 20 VJ10 6 Lead wire length ZCU Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 AMJ (For 110 VAC) Note) If ordering switch with 5 m lead wire, specify both switch and lead wire with connector part numbers. Ordering example) ZX100-K150Z-ECN1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. 3A 36 VJ10 6 Misc.

Type: 1A (For 100 VAC)

Type: For 100 VAC, Lead Wire Length: -

80

Fig. 1 Recommended piping configuration Tube size Mounting pitch A Unit: mm Straight portion length Nylon tube Soft nylon tube Polyurethane tube 44 or more 56 or more 84 or more 3.2 4 6 25 or more 26 or more 39 or more 16 or more 20 or more 30 or more 29 or more 30 or more 39 or more Tightening Torque for Piping Connection thread Proper tightening torque (Nm) M5 1 to 1.5 1 to 1.5 7 to 9 VCH

MRQ

6 !7 !8 !

Air Pilot Operated Series NVSA

2.99 176) 186 108) 1.4 o09) 1.22 (31) 112) MillimdeB in PaEnthese$ NVSA rt524 4534 M4 t t 6 6 l n / " Eq{I .-.

Type: 1A (For 100 VAC), Lead Wire Length: 30 (3000mm)