VQ7-6/7-8

Control unit type (See pages 3-10-18 and 19 for details.) Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Types with 10, 16, or 20 pins are also available. See p.1.10-67 for details.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range and the angle adjusting direction of the angle adjustable type are changed. of Angle adjusting screw k e R e g ot y n at a g io r r o n n o o ra v ti A n e n gl a e g a ot 1 e dj us 8 of R ti 0 A n ng g k di e le y re ad ct gr ju io o st n o in v g e n di io 9 re ct 0 re ct di io g n in st u dj a e gl 0 n A 8 1 R e ot v at o o io gr n y ra e n k g of e Angle adjusting

Digital Flow Switches

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

1

K MB A MC E GC HA Ball bushing 12 16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60

MGP

S B+stroke A+stroke E MGP MGPM, MGPL Common Dimensions MGQ Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW MGG 42 29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30,

Digital Flow Switches, Series PF2A, Series PF2W

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

3 Port Solenoid Valve Metal Seal Series VZ200 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stations n: Stations Formula L1 = 17n + 10 L2 = 17n + 27 2 44 61 3 61 78 4 78 95 5 95 112 6 112 129 7 129 146 8 146 163 9 163 180 10 180 197 VT Symbol L1 L2 VP Common exhaust: VV3Z2-50 (Built-in One-touch fittings manifold) VG (G) (L) (M) (D) With light/surge voltage suppressor VP (Lead

CJ5-S

Grease pack for stainless steel cylinders/Part no.: GR-R-010 (10 g) 10-14-10 11 Stainless Steel Cylinder Series CG5-S Specifications Action Double acting, Single rod Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.05 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature RE A

CJ5-S

Grease pack for stainless steel cylinders/Part no.: GR-R-010 (10 g) 10-14-10 11 Stainless Steel Cylinder Series CG5-S Specifications Action Double acting, Single rod Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.05 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature RE A

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

B 210.5 198 185.5 173 160.5 148 135.5 123 110.5 98 L dimension 53.3 50.1 46.9 43.8 40.6 37.4 34.3 31.1 28 24.8 Weight (g) A 19 18 17 16 15 14 13 12 11 10 No. 335.5 323 310.5 298 285.5 273 260.5 248 235.5 223 L dimension 84.9 81.7 78.6 75.4 72.2 69.1 65.9 62.7 59.6 56.4 Weight (g) Series For SY3000 (8) A 16 22 25 25 C 51 80.8 97 98 Model AN203-KM8 AN200-KM10 AN300-KM10 AN300-KM12 Effective

ZPT/ZPX

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

0.4

The electrical entry port {VQ1000: G 1/2, VQ2000: G 3/4} permits connection of conduit fittings.

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

CC

E101. 10-17-16

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range and the angle adjusting direction of the angle adjustable type are changed. of Angle adjusting screw k e R e g ot y n at a g io r r o n n o o ra v ti A n e n gl a e g a ot 1 e dj us 8 of R ti 0 A n ng g k di e le y re ad ct gr ju io o st n o in v g e n di io 9 re ct 0 re ct di io g n in st u dj a e gl 0 n A 8 1 R e ot v at o o io gr n y ra e n k g of e Angle adjusting

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

M 30 NA x M5 x 0.8 thread depth 6.5 KA 21 5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3