Prevents Micro-Bubbles

Body material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type

VCW

OUT L FKM (2) Note) High corrosion resistant specification used for armature material. 1 Thread type IN (1) Rc G NPT Nil F N N.O.

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

Title not found

1/4 G 3'l8 G 3/8 'ln case or mixed speciricatio.

Series IDG

Port size Thread type Symbol Bore Size Nil N F Rc NPT G 1 5 10 20 30 3 50 60 75 100 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 20C [4F]) Standard dew point 20C (4F) Model IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Range of operating conditions Standard performance conditions Standard performance Inlet air

Title not found

1/4 G 3/8 G 3/S A.

1

How to Order X214 01 S AS 2 2 0 0 Body size Option Port size Model Thread type Control method Speed Controller with One-touch Fitting Elbow Type, Metal Body/Series AS Refer to How to Order in page 15-9-43 for standard specifications. How to Order X214 2 2 1 01 06 S AS 1FG Body size Option Applicable tubing O.D.

Air Pilot Operated Series NVSA

PORTII{G (No. ot po.ts) "xx" sPA 0111 'r' NPTF Side (S) 5 i sPA 0112 L'NPTF Side (5) 52 sPA 0113 j{' NPTF Side (5), 'n. NPTF Botrom (5} 53 sPA 0114 li" NPTF Bottom (5) 54 SPA 01]5 {' NPTF Side {b) 55 DIFECTIONAL AIR VALVE DIMENSIONS PARTS LIST SERIES NVSA 4E14 NVSA 4114 DETAIL REF. DESCRIP'ION }IATERIAL PART I{O. Body Alum. O-C. SDrino .

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Speed Controller with

Pages 3, 8 Lubricant: Vaseline -X12 Grease-free + Restrictor -X21 Restrictor -X214 DIN rail mounting bracket L-bracket Clean Series 10AS Series CAT.ES20-243B AS Series Flow Rate Reproducibility Lightweight Weight: Approx. 27% lighter AS1002F-04A 4.0 g Current type AS1002F-04 5.5 g Stopper face Improved reproducibility of flow rate Stable knob position when fully closed (no flow rate) onto

PSxx-OMS0004CN

02 R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1 M12 -17No.PS-OMS0004CN-D ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5

ML1

40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C ML1C LC-01 B 113.2 137.2 162.2 25 32 40 Mounting position Series ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 4.7-11

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Use G external threads with G internal threads. AS-D How to distinguish between G, R and NPT threads AS-T For R, NPT thread R: Without slit NPT: With slit For G thread Step 5. Use R external threads with Rc internal threads and NPT external threads with NPT internal threads. ASP ASN Piping Caution For Uni Thread AQ Tightening method 1.

Ionizer

85% Rh (No condensation) Ambient temperature Ambient humidity Case material Vibration resistance Shock resistance Weight Installation distance Compliance with overseas standards/directive ABS Durability 50 Hz Amplitude 1 mm XYZ each 2 hours ABS ABS, Stainless steel Static Neutralization Equipment 10 G 220 g (Including cable weight) 110 g (Including cable weight) 200 g (Including cable weight