ZP Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 71.5 36.5 35.5 72.5 23 G Model E F E F ZPTD20-B5-A10 109.5 45.5 46.5 110.5 51 U C ZPT 20-
Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4
E 25, 28 H thread effective depth C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5
Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !
CH2m CHA Related Equipment D-m (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500
EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.
10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate
VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.
With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]
O.D.Q I ZR 5 H R J Hexagon width across flats 10 Hexagon width across flats 2 F E ZM Hexagon width across flats 12 D C Applicable tubing O.D.Q ZH Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 ZU F E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15
, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E
Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 71.5 36.5 35.5 72.5 23 G Model E F E F ZPTD20-B5-A10 109.5 45.5 46.5 110.5 51 U C ZPT 20-
) 1.3 x 10-8 Nil A B C None w, e w e DSeal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
position (10 V/100 Mpulses) (Note 2) _ _ 0 D Bus voltage (200 V class and 100 V class: +8 V/400 V, 400 V class: +8 V/800 V) _ _ 0 E Speed command 2 (8 V/max. speed) _ _ 1 0 Load-side droop pulses (10 V/100 pulses) (Note 2) _ _ 1 1 Load-side droop pulses (10 V/1000 pulses) (Note 2) _ _ 1 2 Load-side droop pulses (10 V/10 pulses) (Note 2) _ _ 1 3 Load-side droop pulses (10 V/10 pulses) (Note
0 L = 100 mm Max. speed = Over 200 mm/s 10 10 LEYG25L E LEYG32L E/40L E LEYG32L E/40L E LEYG25L E LEYG32L E/40L E LEYG32L E/40L E Load mass m [kg] Load mass m [kg] LEYG25L E LEYG25L E LEYG16L E LEYG16L E 1 1 LEYG16L E LEYG16L E 120 125 120 125 0.1 0.1 10 100 1000 35 40 10 100 1000 35 40 Stroke [mm] Stroke [mm] Operating Range when Used as a Stopper LEYGM (Sliding bearing) Caution 100 LEYG32M
With External Pilot Specifications (Pitch) 13.5 P = 10.5 18.3 14.1 8.4 60.6 SV 8.6 45.5 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 24.6 SZ 23 59.5 5 3 E 3 5 E 3/5 E 3/5 E 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 SY 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6,
(Female thread) 63 80 ZPT HB-B (Female thread) 100 125 70 Width across flat 60 4 x M5 x 10 G G E F 11 Width across flat 37 45 4 x M4 x 8 E 10 F Y Y 8 10 34 40 C C A A B B D D Dimensions A Dimensions A B C D E F G Y Model ZPT63HB-B8 ZPT63HB-B10 ZPT63HB-B12 ZPT63HB-B16 ZPT80HB-B8 ZPT80HB-B10 ZPT80HB-B12 ZPT80HB-B16 B C D E F G Y Model ZPT100HB-B12 ZPT100HB-B16 ZPT125HB-B12 ZPT125HB-B16 M8 x
Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 35.5 23 71.5 36.5 72.5 G Model E F E F ZPTD20-B5-A10 45.5 109.5 46.5 110.5 51 U C ZPT 20-
W W FY B D E d MA M a NB C F A K NA B S + Stroke FT H FX ZZ + Stroke FZ With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R D E 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 44 18 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14
connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)