45

Triangle mark position Stations n 11 stations 12 13 14 15 16 17 18 19 20 stations 310.5 323 235.5 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 (Rail mounting hole pitch 12.5) 300 312.5 225 237.5 237.5 250 262.5 27.5 287.5 300 286.5 297 202.5 213 223.5 234 244.5 255 265.5 276 12 13 16.5 17.5 12 13 14 15 16 17 1-6-96 Base Mounted Series SX3000/5000 SS5X3-45PDStations U(26 pins) C4 C6 (Pitch

45

17.5 15.5 14 12 16.5 15 13 12 13 14 15 16 stations Stations n 11 stations 335.5 DIN rail 348 360.5 373 398 410.5 L1 L2 L3 L4 325 337.5 350 362.5 387.5 400 262 278 294 310 326 342 Manual override (Press and turn for the locking type.)

VXA21/22

Port size 01 02 03 1 8 1 4 3 8 Valve/Body 4 Common/single Refer to table q for configuration. Options V Standard For vacuum, non-leak Select an option mark by the "Applicable Fluid Check List" p.4.0-13 for a special fluid outside of standard. VX VNl Table q Port/Orifice Size Orifice size (No.)

CG1

13 10 (12) 24.2 6 6 6 8 10 10 107 13 13 13 16 20 20 0.25 stroke (22.5) 1.25 2 3 10 (12) 26.7 112 (13) 10 (12) 30.2 114 (13) (25) 10 (12) 13 13 34.6 132 (13) (25) 11.5 14.5 40.6 155 47.1 155 The minimum stroke for rod boot equipped style is 20mm.

VP4

Series 50-VFE Series 50-VPE 3-6-13

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

Thread: N (NPT), Actuator Type: 13 (Roller Adjustment Lever)

Thread: F [G(PF)], Actuator Type: 13 (Roller Adjustment Lever)

Pipe Port Type: G, Rod Arm Type: Adjusting Roller Arm, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 3-Port, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Rod Arm, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 5.36

Pipe Port Type: NPT, Rod Arm Type: Adjusting Roller Arm, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 3-Port, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Rod Arm, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 5.36

IZx-OMV0005

Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2. Ionizer Body Installation . 14 3-2. Wiring . 17 3-2-1. Connection Circuit . 17 3-2-2. Wiring of the power supply cable . 19 3-2-3. Ground connection . 19 3-2-4. AC adapter . 19 3-3. Timing chart . 20 4. Function . 21 4-1. Name of Parts . 21 4-2.

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

IDX-OM-W023

T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E-10-T IDU8E/11E-20-T GFCI GFCI R For Option R R For Option R R For Option R R For Option R TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

VSA4

15 14 17 15 17 Note) Weight (kg) Valve model Body size Function Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440-06

Manifold Specifications

(Valve) DXT192-13-1A1 pc. (Blanking plate assembly) VV5Z3-43-031-C41 pc. (Manifold base) VZ3140-5LZ1 pc. (Valve) VZ3240-5LZ1 pc. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) EVS VFN The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

SYJA300

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 64 (Without subplate 34) N.C. Base mounted (with sub-plate) 1/8 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C.

Standard Combinations

Threads for IN and OUT ports are not machined. 1/8, 1/4 40 40 28 11 11 1/8, 1/4 53 48 34 14 13 1/4, 3/8 70 54 42 18 15 How to Order Refer to the attachment table on page 4 or 7 for standard bypass port sizes applicable to ACG. 30 01 00 AKM Check valve Bypass port size for redirecting air flow Body size Body size 20 30 40 Port size Symbol 30 40 20 01 02 03 1/8 1/4 3/8 Thread type Nil N F Rc

HRX-OM-X010

HRZ Series 3.3 Procedure for Installation 3-13 3-13 HRX-OM-X010 Chapter 3 Transporting and Installation 11. Connect the communication cables with P1 and P2.